Patents by Inventor Junji Ohe

Junji Ohe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck
    Patent number: 6643115
    Abstract: Disclosed is an electrostatic chuck comprising a ceramic dielectric layer having a surface for placing thereon a work that is to be held, and an electrode provided on a surface opposite to the surface of the ceramic dielectric layer for placing the work thereon, wherein: the placing surface of the ceramic dielectric layer is sectionalized into an outer peripheral region and a central region by gas injection grooves extending in a circumferential manner; the surface roughness Ra(o) of the outer peripheral region of the placing surface and the surface roughness Ra(i) ot the central region satisfy the following conditions: 0.6≦Ra(i)≦1.5 &mgr;m Ra(o)≦0.7 &mgr;m Ra(i)≧Ra(o)  and the outer peripheral region of the placing surface is higher than the inner peripheral region by not less than 0.6 &mgr;m.
    Type: Grant
    Filed: February 27, 2002
    Date of Patent: November 4, 2003
    Assignee: Kyocera Corporation
    Inventors: Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Junji Ohe, Masaki Terazono, Yasushi Migita, Naohito Higashi, Hitoshi Atari
  • Electrostatic chuck
    Publication number: 20020176219
    Abstract: Disclosed is an electrostatic chuck comprising a ceramic dielectric layer having a surface for placing thereon a work that is to be held, and an eloctrode provided on a surface opposite to the surface of the ceramic dielectric layer for placing the work thereon, wherein:
    Type: Application
    Filed: February 27, 2002
    Publication date: November 28, 2002
    Inventors: Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Junji Ohe, Masaki Terazono, Yasushi Migita, Naohito Higashi, Hitoshi Atari