Abstract: The present application relates to a bidirectional digital switching power amplifier based on a magnetic suspension drive platform and its multi-step current predictive control method. The control method includes the following steps: establishing a prediction model of a bidirectional digital switching power amplifier; introducing a feedback correction term for a closed loop prediction; calculating an optimal modulation duty cycle through a value function; generating, according to the obtained modulation duty cycle, four PWM drive signals by a pulse width modulation module to control four switch tubes respectively to achieve current prediction control. The present application effectively improves the system control accuracy with small steady-state error, small on-line computation amount, simple algorithm, easy digital realization, and good practical value and application prospect.

Abstract: The present application relates to a bidirectional digital switching power amplifier based on a magnetic suspension drive platform and its multi-step current predictive control method. The control method includes the following steps: establishing a prediction model of a bidirectional digital switching power amplifier; introducing a feedback correction term for a closed loop prediction; calculating an optimal modulation duty cycle through a value function; generating, according to the obtained modulation duty cycle, four PWM drive signals by a pulse width modulation module to control four switch tubes respectively to achieve current prediction control. The present application effectively improves the system control accuracy with small steady-state error, small on-line computation amount, simple algorithm, easy digital realization, and good practical value and application prospect.

Abstract: Disclosed are a substrate carrying manipulator and a substrate carrying device. The substrate carrying manipulator includes: a bearing frame, having a bearing surface; grabbing assemblies installed on the bearing frame and configured to cooperate with a non-display region of a substrate; and anti-contact assemblies configured to at least provide a gas repulsive force in a direction from the bearing surface to the substrate for a display region of the substrate.