Patents by Inventor Junmao WANG

Junmao WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay key, method of forming the same, and method of measuring overlay accuracy
    Patent number: 10162273
    Abstract: Embodiments of the present disclosure disclose an overlay key including at least two overlay marks each having a first sub-mark and a second sub-mark centro-symmetrical to each other, the first sub-mark and the second sub-mark each including two bar patterns that are perpendicular to each other and have a common end. At least two of the overlay marks are located in different layers. Also disclosed is a method of forming the overlay key and a method of measuring overlay accuracy.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: December 25, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yuhu Zhang, Junmao Wang, Bin Nie, Hao Yue
  • OVERLAY KEY, METHOD OF FORMING THE SAME, AND METHOD OF MEASURING OVERLAY ACCUARACY
    Publication number: 20180107126
    Abstract: Embodiments of the present disclosure disclose an overlay key including at least two overlay marks each having a first sub-mark and a second sub-mark centro-symmetrical to each other, the first sub-mark and the second sub-mark each including two bar patterns that are perpendicular to each other and have a common end. At least two of the overlay marks are located in different layers. Also disclosed is a method of forming the overlay key and a method of measuring overlay accuracy.
    Type: Application
    Filed: May 3, 2016
    Publication date: April 19, 2018
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yuhu ZHANG, Junmao WANG, Bin NIE, Hao YUE