Abstract: Disclosed is a method of processing a substrate, the method including: a coating operation of supplying a coating liquid containing a volatile component to a top surface of the substrate to form a cleaning film; and a cleaning film processing operation of processing the cleaning film, in which the cleaning film processing operation includes: a crack formation operation of generating a crack in the cleaning film formed on the substrate to form film flakes; and a delamination operation of delaminating the film flakes from the top surface of the substrate by volatilizing the volatile component contained in the film flake.

Abstract: A scale-free boiler of the present disclosure includes a boiler case, a main flow path disposed inside the boiler case and in communication with a heating flow path disposed outside the boiler case to provide heating, a heat source for heating water flowing along the main flow path, and a filter for removing, based on an electrical force, an ionic material contained in the water flowing along the main flow path or water to be supplied to the main flow path to prevent occurrence of scale.

Abstract: An embodiment electric vehicle drive apparatus for decreasing a drive speed of a motor and transferring the decreased drive speed to an output shaft is provided. The apparatus includes a first planetary gear set including three first planetary gear elements in which a first element is connected to the motor and a second element is connected to a first output shaft, a second planetary gear set including three second planetary gear elements in which a first element is connected to a third element of the three first planetary gear elements, a second element is connected to a second output shaft, and a third element is fixed, and a third planetary gear set including three third planetary gear elements in which first and second elements are connected to two elements of the three first planetary gear elements, respectively, and a third element is connected to a torque vectoring motor.

Abstract: A static electricity visualization system capable of visually confirming the level of the measured static electricity is provided. The static electricity visualization system comprises a first measuring unit for measuring a static electricity level detected at a first position of a measurement target and comprising a first mark, a photographing unit for generating a photographed image by photographing the measurement target, a processor for recognizing a first mark in the photographed image and calculating coordinates of the first mark on the photographed image, and an output unit for outputting a static electricity visualization image that visualizes the static electricity level measured by the first measuring unit in a first mode, wherein the static electricity visualization image comprises a color corresponding to a level of static electricity measured by the first measuring unit on the coordinates of the first mark of the photographed image.

Abstract: A linear motor design variable verification method and a linear motor design variable optimization method are disclosed. The linear motor design variable verification method includes a first step of deriving a magnetic permeability matrix of a linear motor from a linear motor design variable; a second step of deriving a Maxwell matrix of the linear motor from the magnetic permeability matrix of the linear motor via LU decomposition; a third step of deriving, from the Maxwell matrix of the linear motor, at least one verification target physical quantity selected from a group including a force of the linear motor, a magnetic flux linkage passing through each of coils of a stator of the linear motor, a counter electromotive force of the linear motor, and an inductance of the linear motor; and a fourth step of comparing the derived verification target physical quantity with a predetermined reference value, and determining whether a target verification condition is satisfied, based on the comparing result.

Abstract: A solar panel disassembling apparatus according to an embodiment of the present disclosure separates a glass plate of a solar panel and a film layer bonded to the glass plate from each other. The solar panel disassembling apparatus includes a supply module that stands and fixes the solar panel such that a bond line between the glass plate and the film layer is exposed upward and downward and that moves the solar panel in a parallel direction parallel to a bonding surface between the glass plate and the film layer, and a wire-shaped cutting blade that is disposed in front of the solar panel in a movement direction of the solar panel to have a distance from the supply module, is disposed in parallel to the bonding surface, and separates the glass plate and the film layer from each other.

Abstract: A mask design device for 3D proximity field pattering based on electric field control is provided. The mask design service, for producing a nanostructure having a constant period, may include: a material selector configured to select a material of the nanostructure having a specific refractive index; an objective function executor configured to execute an objective function based on a 2D electric field intensity map of the nanostructure formed from the material having a specific height and width; and an optimizer configured to set at least one of a period, the refractive index of the nanostructure, and the objective function, as an input variable, and configured to input the input variable into a predetermined algorithm to calculate design parameters of the nanostructure. A mask having the nanostructure, a method for manufacturing the mask, and a nano patterning device are also provided.

Abstract: The present disclosure relates to a system and a method for validating the validity of a sensor, in particular, validating the validity of a sensor using a control limit. The method for validating the validity of a sensor using a control limit includes inferring a posterior distribution of a parameter in a Bayesian technique using a prior distribution of the parameter of sensor data and historical data of the sensor, setting a target credible interval for the posterior distribution of the parameter and setting a control line of the sensor data using the set credible interval, and validating the validity of the sensor by monitoring whether the actual measurement data of the sensor deviates from the control line.

Abstract: A display device includes a first barrier insulating layer on a first substrate and including a first contact hole, a pad having a portion on the first barrier insulating layer and another portion inserted into the first contact hole, a second barrier insulating layer including a first portion on an upper surface of the portion of the pad and a second portion on an upper surface of the another portion of the pad, a third barrier insulating layer on the second portion of the second barrier insulating layer, a coating layer on the third barrier insulating layer, a second substrate on the coating layer and the first portion of the second barrier insulating layer, a first connection line on the second substrate and electrically connected to the pad, and a flexible film including a lead electrode inserted into an open part of the first substrate.

Abstract: A seatback-folding device for emergency escape for vehicles is equipped with a simply structured mechanism for emergency escape. A locking operation at the time of unfolding of a seatback of a second-row seat and an unlocking operation at the time of folding of the seatback of the second-row seat are performed by ascending/descending of a shaft caused by operation of a lever, thereby not only enabling an occupant sitting on a third-row seat to quickly fold the seatback of the second-row seat and thus to easily secure an emergency escape route, but also reducing the number of components, weight, the number of assembly processes, and manufacturing cost compared to a related art.

Abstract: A display device includes: a substrate including a display area and a non-display area; a transistor and a light emitting element, which are disposed on the display area; a pad portion disposed in the non-display area, where the pad portion includes a first metal pattern; and a printed circuit board or a data driver, which is connected with the pad portion. The transistor includes a semiconductor layer disposed on the substrate and a source electrode or a drain electrode which is electrically connected with the semiconductor layer. The source electrode or the drain electrode includes a first layer including a first metal, a second layer including a second metal, and a third layer including the first metal, where the first metal pattern includes the first metal, and is connected with the printed circuit board or the data driver.

Abstract: A lens driving device is provided, the lens driving device including: a housing; a bobbin disposed at an inner side of the housing; a first driving part disposed on the bobbin; a second driving part disposed on the housing and facing the first driving part; a first mounting part disposed on the bobbin; a second mounting part disposed on the bobbin and disposed at an opposite side of the first mounting part based on a center of the bobbin; a first magnet disposed on the first mounting part; a sensor part sensing a position of the first magnet; and a second magnet disposed on the second mounting part.

Abstract: Disclosed herein is a battery pack. The battery pack can include a plurality of battery cells, a pack case defining a housing configured to accommodate the battery cells, a first venting path extending across the pack case, and a second venting path extending along at least one peripheral side of the pack case. The first venting path can provide a conduit for a gas generated from any of the battery cells. The second venting path can be in fluid communication with the first venting path and an opening on the pack case such that the gas from the battery cells is configured to travel from the first venting path to the second venting path and to be discharged from the battery pack via the opening.

Abstract: The present disclosure relates to an Ethernet cable for a vehicle, which enables large-capacity data communication and high-speed transmission, required in a network system for a vehicle, on the basis of low voltage differential signaling (LVDS), minimizes the overall outer diameter and weight, and has excellent durability against vibration and excellent electrical characteristics.

Abstract: There is provided a semiconductor device including an etching stop film which is placed disposed on a substrate; an interlayer insulating film which is disposed on the etching stop film; a trench which penetrates the interlayer insulating film and the etching stop film; a spacer which extends along side walls of the trench; a barrier film which extends along the spacer and a bottom surface of the trench; and a filling film which fills the trench on the barrier film. The trench includes a first trench and a second trench which are spaced apart from each other in a first direction and have different widths from each other in the first direction. A bottom surface of the second trench is placed disposed below a bottom surface of the first trench.

Abstract: A VCM is disclosed, the VCM including a rotor having a first driving unit and arranged therein with a lens, a stator having a second driving unit wrapping the first driving unit and being opposite to the first driving unit, a base supporting the stator and having an opening formed at a position corresponding to that of the lens, a connection terminal including a pair of first and second connection terminals arranged at an upper surface of the base, and an elastic member including a first elastic member coupled to the rotor and electrically connected the first connection terminal and a second elastic member coupled to the rotor and electrically connected the second connection terminal.

Abstract: A fingerprint recognition device is provided. The fingerprint recognition device includes an image acquisition module acquiring a fingerprint image including an input fingerprint, a preprocessing module generating a preprocessed image by preprocessing the fingerprint image, a minutiae extraction module extracting coordinates of each of minutiae and orientation points of the input fingerprint from the preprocessed image and a fake detection module receiving regions-of-interest (ROIs), including the coordinates of each of the minutiae or orientation points of the input fingerprint, and determining whether the input fingerprint is a fake by performing learning using the received ROIs.

Abstract: There are provided a negative electrode active materials including a silicon/carbon (Si/C) composite in which a silicon-based coating layer is formed on carbon-based particles, wherein the Si/C composite has a peak area ratio A2/A1 of 0.2 to 3.0 as determined by X-ray diffraction analysis, and a method of preparing a negative electrode active material for a secondary battery, which includes a pretreatment step of heat treating carbon-based particles; and a microwave sintering step of mixing silicon-based particles with the heat-treated carbon-based particles and irradiating the resulting mixture with microwaves.

Abstract: Disclosed herein are a Schottky barrier diode (SBD) and a method of manufacturing the same. The SBD includes a substrate, an ohmic layer formed on a portion of an upper portion of the substrate, a Schottky layer formed on a portion of an upper portion of the ohmic layer, an insulating layer formed on a portion of the upper portion of the ohmic layer, a low-k material layer formed on a portion of the upper portion of the substrate, and a Schottky metal layer formed on portions of upper portions of the low-k material layer and the insulating layer.

Abstract: A solar panel cutting unit according to an embodiment can separate layers of a solar panel from each other at once. The solar panel cutting unit separates thin layers of a solar panel from each other and includes a frame, a panel transporting mechanism that is provided at the frame and lowers the solar panel in a vertical direction such that adhesion lines of the thin layers are arranged downward, a pair of guide roller units that is positioned below the panel transporting mechanism and guides and lowers the solar panel, and a wire cutting mechanism that includes a pair of support rollers and cutting wires which connect the support rollers to each other and extend in the same direction as the adhesion lines such that the wire cutting mechanism separates the thin layers of the solar panel from each other.