Abstract: A vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing has a main body, in which a sleeve and a lower mounting plate, a piston cylinder and the sleeve are both lubricated and supported with air bearing surfaces respectively, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a spherical air bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.

Abstract: A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.

Abstract: A magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing has a main body, in which a sleeve and a lower mounting plate are supported with a magnetically suspended thrust bearing, a piston cylinder and the sleeve are lubricated and supported with a cylinder air bearing surface, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a joint ball bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.

Abstract: A magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing has a main body, in which a sleeve and a lower mounting plate are supported with a magnetically suspended thrust bearing, a piston cylinder and the sleeve are lubricated and supported with a cylinder air bearing surface, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a joint ball bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.

Abstract: A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.

Abstract: A vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing has a main body, in which a sleeve and a lower mounting plate, a piston cylinder and the sleeve are both lubricated and supported with air bearing surfaces respectively, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a spherical air bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.

Abstract: A non-contact three-dimensional probing system based on a spherical capacitive plate has a probe including a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7). The active shielding pipe (8) is driven by the signal converting and processing circuit (13) of the probing system to maintain equipotential with the signal conducting rod (7), and so the influence of parasitic capacitance and spatial electromagnetic interference can be eliminated.

Abstract: An ultraprecision non-contact three-dimensional probing system based on a spherical capacitive plate has a probe (12) which comprises a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The stylus pipe (6), the active shielding pipe (8) and the signal conducting rod (7) are coaxially assembled, and they are insulated against each other with the insulating element (9). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7).