Patents by Inventor Junnosuke Daimon

Junnosuke Daimon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sheet plasma CVD apparatus
    Patent number: 5217761
    Abstract: A sheet plasma CVD apparatus for forming a film by generating sheet plasma in parallel with a substrate comprising a gas supply nozzle in opposition to the substrate with the sheet plasma sandwiched therebetween. A source gas supply opening is formed in the center of the gas supply nozzle. A plurality of reaction gas supply openings are formed in the periphery of the source gas supply opening, the source jetted out from the source gas supply opening and the reaction jetted out from the reaction gas supply openings. The source and reaction gases intersect with each other in the sheet plasma.
    Type: Grant
    Filed: December 23, 1991
    Date of Patent: June 8, 1993
    Assignee: Chugai Ro Co., Ltd.
    Inventors: Ken Okada, Junnosuke Daimon