Abstract: A substrate processing apparatus, includes: a substrate transfer mechanism configured to advance and retreat a holding body that holds a substrate by symmetrically arranging two link mechanisms each including a driving arm and a driven arm; a processing module; a rotation angle measuring part configured to measure a rotation angle the driving arms; a holding body detection part configured to detect that a specific portion of the holding body is located at a predetermined position; and a controller configured to execute a step of acquiring a measurement value of the rotation angle of the driving arm, a step of obtaining a moving average of the measurement value of the rotation angle, and a step of obtaining a correction amount of the rotation angle so that a substrate transfer position of the holding body of the substrate transfer mechanism for the processing module becomes a reference position.

Abstract: A substrate processing apparatus, includes: a substrate transfer mechanism configured to advance and retreat a holding body that holds a substrate by symmetrically arranging two link mechanisms each including a driving arm and a driven arm; a processing module; a rotation angle measuring part configured to measure a rotation angle the driving arms; a holding body detection part configured to detect that a specific portion of the holding body is located at a predetermined position; and a controller configured to execute a step of acquiring a measurement value of the rotation angle of the driving arm, a step of obtaining a moving average of the measurement value of the rotation angle, and a step of obtaining a correction amount of the rotation angle so that a substrate transfer position of the holding body of the substrate transfer mechanism for the processing module becomes a reference position.

Abstract: A hybrid optical element includes: a glass substrate having a first optically functional surface and a second optically functional surface; and a resin layer bonded to the second optically functional surface. The glass substrate further has an outer peripheral surface provided around the first optically functional surface. The outer peripheral surface has a surface roughness Ra of at least 1 ?m but not more than 20 ?m.

Abstract: A diffractive optical element includes a first optical member including a first diffraction grating; and a second optical member including a second diffraction grating and arranged so that the second diffraction grating faces the first diffraction grating. Inorganic particulates are dispersed in the second optical member. An inorganic particulate volume ratio is higher in the second diffraction grating than a portion of the second optical member on an opposite side of the second diffraction grating.

Abstract: A hybrid optical element includes: a glass substrate having a first optically functional surface and a second optically functional surface; and a resin layer bonded to the second optically functional surface. The glass substrate further has an outer peripheral surface provided around the first optically functional surface. The outer peripheral surface has a surface roughness Ra of at least 1 ?m but not more than 20 ?m.