Abstract: Evaporation and condensation of carbon is effected by arc discharge between an anode formed of a carbon electrode and a cathode disposed facing the carbon electrode 2 in an inert gas atmosphere, and at the same time, the generated carbon nanotubes are dispersed into an inert gas and transported along with the inert gas through a transporting tube, and a jet of the inert gas containing the carbon nanotubes is emitted from a nozzle, thereby forming carbon nanotubes on a target substrate. This provides a carbon nanotube manufacturing method wherein carbon nanotubes are generated with a simple process, and the CNT patterning process is simplified by forming a carbon nanotube film on a substrate, thereby reducing costs.

Abstract: Providing a manufacturing method of a piezoelectric element by which even if an electrode and a piezoelectric film stacked on a substrate are baked at a high temperature, the electrode does not oxidize and mutual diffusion between the substrate, the electrode and the piezoelectric film may be suppressed. The electrode is adapted as a laminated layer body which includes an electroconductive oxide layer, a mixture layer having an electroconductive oxide and electroconductive metal, and an electroconductive metal layer including the electroconductive metal from a substrate side, and the mixture layer above is adapted as a graded composition structure in which a ration of the electroconductive oxide is highest in an interface with the electroconductive oxide layer and lowest in an interface with the electroconductive metal layer.

Abstract: A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

Abstract: A particle film deposition apparatus and method are provided, with which ultra fine particles are generated by arc heating. The generated ultra fine particles can be efficiently sucked up into a transfer tube regardless of an arc voltage, and the resulting film can be stable in shape. An evaporation material 8 to be evaporated by arc heating and to generate ultra fine particles is connected to an electrode. As other electrodes, a plurality of rods 17 each having a discharge section at the tip thereof are provided. These rods 17 are so arranged as to be directed in each different direction with respect to the evaporation material 8.

Abstract: A particle film deposition apparatus and method are provided, with which ultra fine particles are generated by arc heating. The generated ultra fine particles can be efficiently sucked up into a transfer tube regardless of an arc voltage, and the resulting film can be stable in shape. An evaporation material 8 to be evaporated by arc heating and to generate ultra fine particles is connected to an electrode. As other electrodes, a plurality of rods 17 each having a discharge section at the tip thereof are provided. These rods 17 are so arranged as to be directed in each different direction with respect to the evaporation material 8.

Abstract: A method of manufacturing an electron-emitting device having excellent electron emission characteristics is provided in which fibers comprising carbon as the main composition are fixed (bonded) to a substrate in a desired area and at a desired density with simple processes and inexpensive manufacture cost, and a manufacture method for an electron source, a light-emitting apparatus and an image forming apparatus using such electron-emitting devices is provided. A method of manufacturing an electron-emitting device made of material comprising carbon as main composition by an aerosol type gas deposition method in which the material comprising carbon as the main composition is aerosolized and transported together with gas, and tightly attached (bonded) to a substrate via a nozzle.

Abstract: A nozzle has an inlet opening connected to a carrier pipe, an outlet opening for spraying an aerosol, and an aerosol-flow-controlling portion positioned between the inlet opening and the outlet opening. The aerosol-flow-controlling portion of the nozzle has an area which is smaller than an area of the inlet opening and which is larger than an area of the outlet opening to deposit a film with a uniform thickness.

Abstract: A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

Abstract: A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

Abstract: A method for manufacturing an inkjet head having orifice plates with improved ink-repellent properties and durability, including the step of forming the ink-repellent film on the surface of the substrate by using the gas deposition process is provided.

Abstract: Evaporation and condensation of carbon is effected by arc discharge between an anode formed of a carbon electrode and a cathode disposed facing the carbon electrode 2 in an inert gas atmosphere, and at the same time, the generated carbon nanotubes are dispersed into an inert gas and transported along with the inert gas through a transporting tube, and a jet of the inert gas containing the carbon nanotubes is emitted from a nozzle, thereby forming carbon nanotubes on a target substrate. This provides a carbon nanotube manufacturing method wherein carbon nanotubes are generated with a simple process, and the CNT patterning process is simplified by forming a carbon nanotube film on a substrate, thereby reducing costs.

Abstract: A particle film deposition apparatus and method are provided, with which ultra fine particles are generated by arc heating. The generated ultra fine particles can be efficiently sucked up into a transfer tube regardless of an arc voltage, and the resulting film can be stable in shape. An evaporation material 8 to be evaporated by arc heating and to generate ultra fine particles is connected to an electrode. As other electrodes, a plurality of rods 17 each having a discharge section at the tip thereof are provided. These rods 17 are so arranged as to be directed in each different direction with respect to the evaporation material 8.

Abstract: A method for manufacturing an inkjet head having orifice plates with improved ink-repellent properties and durability, including the step of forming the ink-repellent film on the surface of the substrate by using the gas deposition process is provided.

Abstract: To provide a film forming method, a film forming apparatus and a manufacturing method of ultrafine particle films, implementing an efficient and proper film thickness control. The manufacturing method of ultrafine particle films includes the steps of: guiding metal ultrafine particles generated in an ultrafine particle generation chamber together with a carrier gas through a conveying pipe to the film forming chamber; and forming a film on a substrate installed over a stage in the film forming chamber through a nozzle, and the evaporated amount of said evaporation material or the thickness of a formed film is controlled by using either the intensity of the emission spectrum intrinsic to an evaporation material or that of the emission spectrum intrinsic to the carrier gas, or else by using both of these.

Abstract: A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

Abstract: A method of manufacturing an electron-emitting device having excellent electron emission characteristics is provided in which fibers comprising carbon as the main composition are fixed (bonded) to a substrate in a desired area and at a desired density with simple processes and inexpensive manufacture cost, and a manufacture method for an electron source, a light-emitting apparatus and an image forming apparatus using such electron-emitting devices is provided. A method of manufacturing an electron-emitting device made of material comprising carbon as main composition by an aerosol type gas deposition method in which the material comprising carbon as the main composition is aerosolized and transported together with gas, and tightly attached (bonded) to a substrate via a nozzle.

Abstract: An electrode plate is formed by a substrate and a plurality of patterned electrodes formed on the substrate. Each patterned electrode has a laminate structure including a first layer of nickel metal formed on the substrate and a second layer of copper formed thereon. The electrode plate may be prepared by a process including a step of etching such a multi-layer metal electrode-forming film formed on a substrate by spraying an etchant downwardly and uniformly onto the substrate while rotating the substrate at a rotation speed sufficient to allow quick liberation of the etchant from the substrate. The metal electrodes can be formed with good adhesion onto the substrate and with good width and thickness accuracy. By incorporating the electrode plate as a pair of substrates sandwiching a liquid crystal, a liquid crystal device free from transmission delay and rounding of voltage waveforms can be provided.

Abstract: To provide a film forming method, a film forming apparatus and a manufacturing method of ultrafine particle films, implementing an efficient and proper film thickness control. The manufacturing method of ultrafine particle films includes the steps of: guiding metal ultrafine particles generated in an ultrafine particle generation chamber together with a carrier gas through a conveying pipe to the film forming chamber; and forming a film on a substrate installed over a stage in the film forming chamber through a nozzle, and the evaporated amount of said evaporation material or the thickness of a formed film is controlled by using either the intensity of the emission spectrum intrinsic to an evaporation material or that of the emission spectrum intrinsic to the carrier gas, or else by using both of these.

Abstract: The invention provides a getter of high performance capable of immediately absorbing a gas generated in an image forming apparatus, and an image forming apparatus exhibiting little luminance variation with the lapse of time and little luminance fluctuation. It also provides a method for producing a getter at a low temperature not effecting other components and in an arbitrary position in a simple manner with a low cost, thereby being adaptable to various processes. The invention relates to a process for forming a non-evaporative getter by a gas deposition method, and to a method of producing an image forming apparatus provided with an electron source, an image forming member for forming an image by irradiation with an electron beam emitted from the electron source, and a non-evaporative getter in a container, which comprises forming the non-evaporative getter by the above-mentioned process for forming the non-evaporative getter.

Abstract: To provide a film forming method, a film forming apparatus and a manufacturing method of ultrafine particle films, implementing an efficient and proper film thickness control. The manufacturing method of ultrafine particle films includes the steps of: guiding metal ultrafine particles generated in an ultrafine particle generation chamber together with a carrier gas through a conveying pipe to the film forming chamber; and forming a film on a substrate installed over a stage in the film forming chamber through a nozzle, and the evaporated amount of said evaporation material or the thickness of a formed film is controlled by using either the intensity of the emission spectrum intrinsic to an evaporation material or that of the emission spectrum intrinsic to the carrier gas, or else by using both of these.