Patents by Inventor Jun-Seop Lee

Jun-Seop Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming patterns in semiconductor devices using photo resist patterns
    Patent number: 7553606
    Abstract: Disclosed is a method of forming patterns in semiconductor devices by using photo resist patterns. These methods comprise forming photo resist patterns on a substrate. Inferior patterns are selected among the photo resist patterns. The inferior patterns are eliminated or shrunken by irradiating the selected inferior patterns with an electron beam.
    Type: Grant
    Filed: October 4, 2006
    Date of Patent: June 30, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Gun Kang, Jin-Mo Kang, Jae-Ho Lee, Jun-Seop Lee
  • Methods of forming patterns in semiconductor devices using photo resist patterns
    Publication number: 20070196769
    Abstract: Disclosed is a method of forming patterns in semiconductor devices by using photo resist patterns. These methods comprise forming photo resist patterns on a substrate. Inferior patterns are selected among the photo resist patterns. The inferior patterns are eliminated or shrunken by irradiating the selected inferior patterns with an electron beam.
    Type: Application
    Filed: October 4, 2006
    Publication date: August 23, 2007
    Inventors: Sung-Gun Kang, Jin-Mo Kang, Jae-Ho Lee, Jun-Seop Lee