Patents by Inventor Junsuke HOSHIYA

Junsuke HOSHIYA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mounting state informing apparatus and mounting state informing method
    Patent number: 11543807
    Abstract: A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: January 3, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Naoto Hayasaka, Naoki Mihara, Kouko Yumura, Junsuke Hoshiya
  • MOUNTING STATE INFORMING APPARATUS AND MOUNTING STATE INFORMING METHOD
    Publication number: 20200117175
    Abstract: A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.
    Type: Application
    Filed: October 11, 2019
    Publication date: April 16, 2020
    Inventors: Naoto Hayasaka, Naoki Mihara, Kouko Yumura, Junsuke Hoshiya
  • Plasma processing apparatus
    Patent number: 10312057
    Abstract: A plasma processing apparatus includes a processing chamber, a table disposed in the processing chamber, a dielectric window provided at the processing chamber, and a surrounding body made of a dielectric material surrounding a processing space between the table and the dielectric window. The dielectric window and the surrounding body are separated from each other in a vertical direction with a predetermined gap therebetween.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: June 4, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Ippei Shimizu, Naoki Mihara, Jun Yoshikawa, Michitaka Aita, Yoshikazu Azumaya, Junsuke Hoshiya
  • PLASMA PROCESSING APPARATUS
    Publication number: 20160126114
    Abstract: A plasma processing apparatus includes a processing chamber, a table disposed in the processing chamber, a dielectric window provided at the processing chamber, and a surrounding body made of a dielectric material surrounding a processing space between the table and the dielectric window. The dielectric window and the surrounding body are separated from each other in a vertical direction with a predetermined gap therebetween.
    Type: Application
    Filed: October 14, 2015
    Publication date: May 5, 2016
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masayuki KOHNO, Yusuke YOSHIDA, Naoki MATSUMOTO, Ippei SHIMIZU, Naoki MIHARA, Jun YOSHIKAWA, Michitaka AITA, Yoshikazu AZUMAYA, Junsuke HOSHIYA