Patents by Inventor Juntian QU

Juntian QU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250021014
    Abstract: The present application discloses a scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system, which includes an electron chamber, an ion chamber, a specimen chamber and a control system, wherein the electron chamber includes an electron chamber housing, an electron gun, an anode, an electron beam blanker, an electromagnetic lens and an electron beam deflection coil, the ion chamber includes an ion chamber housing, an ion source, an ion beam-scanning deflection electrode and the like, the specimen chamber includes a specimen chamber housing, a secondary electron detector, a nanoscale-precision compliant servo motion stage system and the like; control system includes a computer, an electron beam scanning controller, an ion beam scanning controller and the like.
    Type: Application
    Filed: September 13, 2024
    Publication date: January 16, 2025
    Applicant: Tsinghua University
    Inventors: Zhen ZHANG, Yijie LIU, Juntian QU
  • Patent number: 12128551
    Abstract: A rigid-flexible coupling gripper, includes: a support unit; a rigid gripper unit and a flexible gripper unit connected to the support unit, wherein the rigid gripper unit and the flexible gripper unit are connected in parallel; the rigid gripper unit includes a sector gear connected to the support unit and a rigid gripper connected to the sector gear and capable of moving driven by the sector gear; a motor drive unit connected to the rigid gripper unit and including a motor and a partial gear including a toothed portion and a non-toothed portion, wherein the motor is connected to the partial gear for driving the partial gear to rotate; the sector gear is configured for being meshed with the toothed portion of the partial gear; and a pneumatic drive unit connected to the flexible gripper unit for driving the flexible gripper unit into a bending deformation.
    Type: Grant
    Filed: May 28, 2024
    Date of Patent: October 29, 2024
    Assignee: Tsinghua Shenzhen International Graduate School
    Inventors: Juntian Qu, Hongwei Hao, Xiankuan Qian, Xiaohao Wang, Houde Liu, Baijin Mao, Jiaqi Zhu, Weichen Wang
  • Publication number: 20220291589
    Abstract: The present application discloses a scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system, which includes an electron chamber, an ion chamber, a specimen chamber and a control system, wherein the electron chamber includes an electron chamber housing, an electron gun, an anode, an electron beam blanker, an electromagnetic lens and an electron beam deflection coil, the ion chamber includes an ion chamber housing, an ion source, an ion beam-scanning deflection electrode and the like, the specimen chamber includes a specimen chamber housing, a secondary electron detector, a nanoscale-precision compliant servo motion stage system and the like; control system includes a computer, an electron beam scanning controller, an ion beam scanning controller and the like.
    Type: Application
    Filed: May 24, 2022
    Publication date: September 15, 2022
    Inventors: Zhen ZHANG, Yijie LIU, Juntian QU