Patents by Inventor Junya Arashima

Junya Arashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck
    Patent number: 12777892
    Abstract: An electrostatic chuck includes an internal electrode and a resin layer that embeds a periphery of the internal electrode. The resin layer contains a thermo-conductive filler.
    Type: Grant
    Filed: March 31, 2023
    Date of Patent: October 27, 2026
    Assignee: TOMOEGAWA CORPORATION
    Inventors: Ryouji Shikata, Yuki Shimizu, Tomoya Hagihara, Junya Arashima
  • ELECTROSTATIC CHUCK
    Publication number: 20250226256
    Abstract: An electrostatic chuck includes an internal electrode and a resin layer that embeds a periphery of the internal electrode. The resin layer contains a thermo-conductive filler.
    Type: Application
    Filed: March 31, 2023
    Publication date: July 10, 2025
    Inventors: Ryouji Shikata, Yuki Shimizu, Tomoya Hagihara, Junya Arashima