Abstract: High processing accuracy of a workpiece is maintained even if the workpiece is misaligned. A laser processing apparatus includes: a setting section that sets a pattern area and a distance measurement position on a captured image; a condition setting storage section that stores image information in the pattern area; a position correction section that detects a misalignment of a new workpiece different from a workpiece used to set the pattern area and corrects the distance measurement position on the new workpiece; a distance measurement section that measures a distance based on a light reception position of distance measuring light in a distance measuring light receiving section; and a Z scanner that adjusts a focal position based on a measurement result of the distance measurement section prior to irradiation of the workpiece with laser light.

Abstract: High processing accuracy of a workpiece is maintained even if the workpiece is misaligned. A laser processing apparatus includes: a setting section that sets a pattern area and a distance measurement position on a captured image; a condition setting storage section that stores image information in the pattern area; a position correction section that detects a misalignment of a new workpiece different from a workpiece used to set the pattern area and corrects the distance measurement position on the new workpiece; a distance measurement section that measures a distance based on a light reception position of distance measuring light in a distance measuring light receiving section; and a Z scanner that adjusts a focal position based on a measurement result of the distance measurement section prior to irradiation of the workpiece with laser light.