Abstract: When executing gradual excitation control, an excitation-current control unit controls an excitation current based on a gradual-excitation control signal from a gradual-excitation control unit, and when the gradual excitation control has been cancelled, the excitation-current control unit controls the excitation current based on a voltage control signal from a control-voltage comparison unit; the gradual-excitation control unit is configured in such a way as to be able to change gradual-excitation control methods in accordance with gradual-excitation-control setting information transmitted from an ECU.

Abstract: The present invention provides a plasma processing method for subjecting a sample on which a metal element-containing film is disposed to plasma etching in a processing chamber. The method comprises: subjecting an inside of the processing chamber to plasma cleaning using a boron element-containing gas; removing the boron element using plasma after the plasma cleaning; subjecting the inside of the processing chamber to plasma cleaning using a fluorine element-containing gas after removing the boron element; depositing a deposited film in the processing chamber by plasma using a silicon element-containing gas after the plasma cleaning using the fluorine element-containing gas; and subjecting the sample to plasma etching after depositing the deposited film.

Abstract: There is provided a vehicle-power-generator control apparatus that can largely raise the gasoline mileage of an internal combustion engine. The vehicle-power-generator control apparatus includes a boost control unit having a function of making a magnetic-field current control unit perform boost-on control or boost-off control, based on a command provided by an ECU through communication and a function of making the magnetic-field current control unit perform boost-on control or boost-off control, based on at least one of a rotation speed of an internal combustion engine and a temperature of a vehicle power generator.

Abstract: The generator control device for vehicle is provided with a boost permission determination circuit capable of controlling the power generation rate, if there is communication between the engine control device and the generator control device for vehicle, the boost permission determination circuit performs the field current control so that the specified power generation rate is achieved by the communication, if there is no communication between the engine control device and the generator control device for vehicle, based on the rotation speed and temperature of the generator for vehicle, the boost permission determination circuit performs the field current control.

Abstract: To provide a generator control device that, even when communication with an external control device is interrupted, evaluates independently, and can increase an amount of power generated so that a drop in DC voltage can be restricted preemptively, while restricting a fluctuation of rotational speed. A generator control device determines that a voltage drop prediction time control is executed when it is predicted that a drop of the DC voltage will be large; generates a rectangular pulse wave such that a duty ratio increases gradually during the excitation time when determining that the excitation control rotational speed condition was fulfilled, and the voltage drop prediction time control is executed; and changes the duty ratio so that the detected value of the DC voltage nears the increased target voltage when determining that the excitation control rotational speed condition was not fulfilled, and the voltage drop prediction time control is executed.

Abstract: The present invention is a plasma processing apparatus that includes a processing chamber where plasma processing is performed on a sample, a radio frequency power supply that supplies radio frequency power to generate plasma, a sample stage on which the sample is placed, and a gas supply unit that supplies a gas to the processing chamber. The gas supply unit includes a first pipe that supplies a first gas as a gas for etching process to the processing chamber, a second pipe that supplies a second gas as a gas for etching process to the processing chamber, and a third pipe through which a third gas as a gas for deposition process flows. The third pipe is coupled to the second pipe. A fourth valve is arranged on the second pipe. The fourth valve prevents the third gas from flowing in a direction toward a supply source of the second gas.

Abstract: There is provided a vehicle-power-generator control apparatus that can largely raise the gasoline mileage of an internal combustion engine. The vehicle-power-generator control apparatus includes a boost control unit having a function of making a magnetic-field current control unit perform boost-on control or boost-off control, based on a command provided by an ECU through communication and a function of making the magnetic-field current control unit perform boost-on control or boost-off control, based on at least one of a rotation speed of an internal combustion engine and a temperature of a vehicle power generator.

Abstract: Power generation control devices (4) of respective power generators (1) transmit conduction rates of field coils (101) of the respective power generators (1) to an external control device (5), while the external control device (5) obtains an average value of the conduction rates, obtains a field duty limiting command value for limiting the conduction rate of the field coil (101) determined by the power generation control device (4) based on the average value, and transmits the field duty limiting command value to the power generation control device (4). With this operation, the power generation control device (4) limits power generation amounts of the respective power generators (1) based on the command value, to thereby equalize the power generation amounts of the respective power generators (1).

Abstract: An interactive processing device according to an embodiment acquires one/more items' information for predetermined operation through interaction with a user, and includes one/more itemized-processing-units and an interaction-control-unit. The itemized-processing-units corresponds to the items. The interaction-control-unit controls the interaction collaboratively with the itemized-processing-units. The interaction-control-unit transmits user-input information to each itemized-processing-unit. Each itemized-processing-unit extracts a candidate for to-be-acquired information and transmits the candidate to the interaction-control-unit with likelihood information of being the to-be-acquired information. The interaction-control-unit determines a candidate having first-threshold-satisfying likelihood as information of an item corresponding to the candidate-transmitted itemized-processing-unit. When undetermined information item exists, the interaction-control-unit outputs inquiry for the item information.

Abstract: The generator control device for vehicle is provided with a boost permission determination circuit capable of controlling the power generation rate, if there is communication between the engine control device and the generator control device for vehicle, the boost permission determination circuit performs the field current control so that the specified power generation rate is achieved by the communication, if there is no communication between the engine control device and the generator control device for vehicle, based on the rotation speed and temperature of the generator for vehicle, the boost permission determination circuit performs the field current control.

Abstract: To provide a generator controller can determine permission of power generation autonomously within a range where startability is not deteriorated, even in the case where the generator controller cannot communicate with the engine controller. A generator controller, in case of communication normal time with engine controller, permits the generation voltage control when the permission command signal is received from the engine controller and the generator rotational speed is higher than a determination value at communication normal time, and prohibits the generation voltage control at other times; in the case of communication failure time, permits the generation voltage control when the generator rotational speed is higher than a determination value at communication failure time, and prohibits the generation voltage control at other times.

Abstract: An interactive processing device according to an embodiment acquires one/more items' information for predetermined operation through interaction with a user, and includes one/more itemized-processing-units and an interaction-control-unit. The itemized-processing-units corresponds to the items. The interaction-control-unit controls the interaction collaboratively with the itemized-processing-units. The interaction-control-unit transmits user-input information to each itemized-processing-unit. Each itemized-processing-unit extracts a candidate for to-be-acquired information and transmits the candidate to the interaction-control-unit with likelihood information of being the to-be-acquired information. The interaction-control-unit determines a candidate having first-threshold-satisfying likelihood as information of an item corresponding to the candidate-transmitted itemized-processing-unit. When undetermined information item exists, the interaction-control-unit outputs inquiry for the item information.

Abstract: To provide a generator controller can determine permission of power generation autonomously within a range where startability is not deteriorated, even in the case where the generator controller cannot communicate with the engine controller. A generator controller, in case of communication normal time with engine controller, permits the generation voltage control when the permission command signal is received from the engine controller and the generator rotational speed is higher than a determination value at communication normal time, and prohibits the generation voltage control at other times; in the case of communication failure time, permits the generation voltage control when the generator rotational speed is higher than a determination value at communication failure time, and prohibits the generation voltage control at other times.

Abstract: There is provided a vehicle-power-generator control apparatus and the control method thereof that does not notify a passenger of any erroneous alarm indicating an abnormality in an electric power generator, even when a power-generation stop command is received. it is determined that a vehicle power generator is not rotating, when the rotation speed, of the vehicle power generator, that is detected based on a power-generation voltage generated across an armature winding of the vehicle power generator is the same as or lower than a predetermined value; there is generated a power-generation stop holding signal obtained by delaying by a predetermined time a time point at which a power-generation stop signal, generated when the decoded command signal is a power-generation stop command signal for stopping electric-power generation, stops; then, the non-rotation determination signal is masked and invalidated, based on the power-generation stop holding signal.

Abstract: Power generation control devices (4) of respective power generators (1) transmit conduction rates of field coils (101) of the respective power generators (1) to an external control device (5), while the external control device (5) obtains an average value of the conduction rates, obtains a field duty limiting command value for limiting the conduction rate of the field coil (101) determined by the power generation control device (4) based on the average value, and transmits the field duty limiting command value to the power generation control device (4). With this operation, the power generation control device (4) limits power generation amounts of the respective power generators (1) based on the command value, to thereby equalize the power generation amounts of the respective power generators (1).

Abstract: The present invention is a plasma processing apparatus that includes a processing chamber where plasma processing is performed on a sample, a radio frequency power supply that supplies radio frequency power to generate plasma, a sample stage on which the sample is placed, and a gas supply unit that supplies a gas to the processing chamber. The gas supply unit includes a first pipe that supplies a first gas as a gas for etching process to the processing chamber, a second pipe that supplies a second gas as a gas for etching process to the processing chamber, and a third pipe through which a third gas as a gas for deposition process flows. The third pipe is coupled to the second pipe. A fourth valve is arranged on the second pipe. The fourth valve prevents the third gas from flowing in a direction toward a supply source of the second gas.

Abstract: A plasma processing method includes forming a deposition film containing silicon as a component in a processing chamber by generating a first plasma in the processing chamber; plasma etching of a sample in which a film containing a metal is formed in the processing chamber; and removing of a metal-based reaction product by generating a second plasma including an element having reducibility and halogen. The plasma processing method further includes removing the deposition film by a third plasma generated by using gas containing a fluorine element; and removing residual gas by a fourth plasma.

Abstract: There is provided a vehicle-power-generator control apparatus and the control method thereof that does not notify a passenger of any erroneous alarm indicating an abnormality in an electric power generator, even when a power-generation stop command is received. it is determined that a vehicle power generator is not rotating, when the rotation speed, of the vehicle power generator, that is detected based on a power-generation voltage generated across an armature winding of the vehicle power generator is the same as or lower than a predetermined value; there is generated a power-generation stop holding signal obtained by delaying by a predetermined time a time point at which a power-generation stop signal, generated when the decoded command signal is a power-generation stop command signal for stopping electric-power generation, stops; then, the non-rotation determination signal is masked and invalidated, based on the power-generation stop holding signal.

Abstract: A master generator is configured to use a duty upper limit value and a duty lower limit value to perform duty restriction processing on a PWM signal in continuous Y cycles out of generated X cycles, and transmit the PWM signal after the restriction processing to a slave generator. The slave generator is configured to receive the PWM signal after the restriction processing transmitted from the master generator as a received PWM signal, and determine that a reception abnormality exists when the received PWM signal is received as a signal representing a duty less than the duty lower limit value or a duty more than the duty upper limit value in continuous (X?Y+1) cycles.

Abstract: The present invention provides a plasma processing method for subjecting a sample on which a metal element-containing film is disposed to plasma etching in a processing chamber. The method comprises: subjecting an inside of the processing chamber to plasma cleaning using a boron element-containing gas; removing the boron element using plasma after the plasma cleaning; subjecting the inside of the processing chamber to plasma cleaning using a fluorine element-containing gas after removing the boron element; depositing a deposited film in the processing chamber by plasma using a silicon element-containing gas after the plasma cleaning using the fluorine element-containing gas; and subjecting the sample to plasma etching after depositing the deposited film.