Abstract: A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.

Abstract: A control station, a slave station, a control method of the control station, and a control method of the slave station capable of securing an evacuation time and controlling a gate to be closed are provided. A control station of an embodiment is a control station in a gate control system for controlling operations of gates. The gate control system including the control station and slave stations. The control station including: an information acquisitor and a control information transmitter. The information acquisitor acquires emergency information via satellite communication. The control information transmitter simultaneously transmits gate control information for controlling the gates to the slave stations via the satellite communication on the basis of the emergency information.

Abstract: A control station, a slave station, a control method of the control station, and a control method of the slave station capable of securing an evacuation time and controlling a gate to be closed are provided. A control station of an embodiment is a control station in a gate control system for controlling operations of gates. The gate control system including the control station and slave stations. The control station including: an information acquisitor and a control information transmitter. The information acquisitor acquires emergency information via satellite communication. The control information transmitter simultaneously transmits gate control information for controlling the gates to the slave stations via the satellite communication on the basis of the emergency information.