Patents by Inventor Junya Tamaki
Junya Tamaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210265411Abstract: A semiconductor device includes a plurality of wirings each having a damascene structure on a semiconductor layer, wherein the plurality of wirings includes a first wiring and a second wiring adjacent to each other, wherein the first wiring includes, along a direction in which the first wiring extends, a first portion, a second portion, and a third portion located between the first portion and the second portion, and wherein a width of the third portion is larger than each of a width of the first portion and a width of the second portion.Type: ApplicationFiled: February 16, 2021Publication date: August 26, 2021Inventors: Junya Tamaki, Takafumi Miki, Ryo Yoshida, Atsushi Kanome, Kosuke Asano, Takehiro Toyoda, Masaki Masaki
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Publication number: 20210199596Abstract: An inspection apparatus inspecting a wafer on which a plurality of patterns are formed by a plurality of exposure shots, the inspection apparatus comprising: acquisition unit configured to acquire first information representing a positional relation between an inspection mark included in a pattern formed by a first exposure shot and an inspection mark included in a pattern formed by a second exposure shot, and second information representing a positional relation between the inspection mark included in the pattern formed by the second exposure shot and an inspection mark included in a pattern formed by a third exposure shot; and derivation unit configured to derive a linear component of an error caused by a reticle, and a linear component of an error caused by a position of a wafer, on the basis of the first information and the second information.Type: ApplicationFiled: December 23, 2020Publication date: July 1, 2021Inventors: Kosuke Asano, Hideki Ina, Yoshiyuki Nakagawa, Junya Tamaki, Takehiro Toyoda, Tomoyuki Tezuka, Yasushi Ohta, Masao Ishioka, Yasushi Matsuno
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Publication number: 20210118924Abstract: A photoelectric conversion device in the present disclosure includes a first trench extending inside a semiconductor substrate from a first face of the semiconductor substrate between a first photoelectric conversion portion and a second photoelectric conversion portion arranged in a first pixel and a second trench extending from a second face of the semiconductor substrate between the first pixel and a second pixel, and the end on the second face side of the first isolation portion is located closer to the second face side than the end on the first face side of the second isolation portion.Type: ApplicationFiled: October 1, 2020Publication date: April 22, 2021Inventors: Junya Tamaki, Keita Torii, Kazuya Igarashi
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Patent number: 9837463Abstract: A solid-state imaging device has a first area in which a plurality of pixels are provided, a second area provided on an outer side with respect to the first area, and a third area provided on the outer side with respect to the second area. An inner-lens layer provided over the first to third areas has an opening. An insulating film provided below the inner-lens layer also has an opening.Type: GrantFiled: May 9, 2016Date of Patent: December 5, 2017Assignee: CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Atsushi Kanome, Shingo Kitamura, Takehiro Toyoda, Masaki Kurihara
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Patent number: 9627319Abstract: A method includes forming a multilayered film including a conductive layer mainly containing aluminum, and a barrier metal layer formed thereon, forming a hard mask layer on the barrier metal layer, patterning a resist on the hard mask layer, patterning the hard mask layer by dry-etching the hard mask layer with the patterned resist as a mask, cleaning a surface of the barrier metal layer with a cleaning solution after the patterning the hard mask layer, and dry-etching the multilayered film with the patterned hard mask layer as a mask after the cleaning the surface of the barrier metal layer. In the patterning the hard mask layer, dry etching is performed with a ratio of a flow rate of an oxidizing gas to a total flow rate of a process gas at less than 1% in a state in which the barrier metal layer is exposed to the process gas.Type: GrantFiled: December 14, 2015Date of Patent: April 18, 2017Assignee: CANON KABUSHIKI KAISHAInventors: Koji Hara, Nobutaka Ukigaya, Takeshi Aoki, Yasuhiro Kawabata, Junya Tamaki, Norihiko Nakata, Satoshi Ogawa
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Publication number: 20160336369Abstract: A solid-state imaging device has a first area in which a plurality of pixels are provided, a second area provided on an outer side with respect to the first area, and a third area provided on the outer side with respect to the second area. An inner-lens layer provided over the first to third areas has an opening. An insulating film provided below the inner-lens layer also has an opening.Type: ApplicationFiled: May 9, 2016Publication date: November 17, 2016Inventors: Junya Tamaki, Atsushi Kanome, Shingo Kitamura, Takehiro Toyoda, Masaki Kurihara
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Publication number: 20160204068Abstract: A method includes forming a multilayered film including a conductive layer mainly containing aluminum, and a barrier metal layer formed thereon, forming a hard mask layer on the barrier metal layer, patterning a resist on the hard mask layer, patterning the hard mask layer by dry-etching the hard mask layer with the patterned resist as a mask, cleaning a surface of the barrier metal layer with a cleaning solution after the patterning the hard mask layer, and dry-etching the multilayered film with the patterned hard mask layer as a mask after the cleaning the surface of the barrier metal layer. In the patterning the hard mask layer, dry etching is performed with a ratio of a flow rate of an oxidizing gas to a total flow rate of a process gas at less than 1% in a state in which the barrier metal layer is exposed to the process gas.Type: ApplicationFiled: December 14, 2015Publication date: July 14, 2016Inventors: Koji Hara, Nobutaka Ukigaya, Takeshi Aoki, Yasuhiro Kawabata, Junya Tamaki, Norihiko Nakata, Satoshi Ogawa
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Patent number: 9208720Abstract: An organic EL displaying apparatus which suppresses a defective display caused by a leak current at a time when an emission period controlling transistor is off is provided. The organic EL displaying apparatus comprises a plurality of pixels each of which includes an organic EL element, a power supply line, a driving transistor and the emission period controlling transistor, a data line, and a control line. In this apparatus, in a certain one of the pixels, a resistance Roff—ILM between source and drain electrodes of the emission period controlling transistor in an off state of the emission period controlling transistor, and a resistance Rbk—Dr between source and drain electrodes of the driving transistor in a state that a minimum gradation displaying data voltage has been applied to a gate electrode of the driving transistor satisfy Roff—ILM?Rbk—Dr.Type: GrantFiled: November 15, 2011Date of Patent: December 8, 2015Assignees: Canon Kabushiki Kaisha, Hitachi Displays, Ltd.Inventors: Junya Tamaki, Nobuhiko Sato, Masami Iseki, Kouji Ikeda, Masahiro Tamura, Takeshi Izumida, Naoki Tokuda
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Patent number: 8866704Abstract: In a light-emitting apparatus including a cap layer disposed on a second electrode and a contact portion, which is disposed in an external region outside the light-emitting region and which electrically connects the second electrode to the drive circuit, the formation end of the cap layer is located in the side nearer to the light-emitting region than is the formation end of the second electrode.Type: GrantFiled: December 16, 2010Date of Patent: October 21, 2014Assignee: Canon Kabushiki KaishaInventors: Junya Tamaki, Takuro Yamazaki, Yojiro Matsuda
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Patent number: 8860301Abstract: A dimming method of an organic EL displaying apparatus having a displaying unit constructed by combining pixels each having a substrate, an organic EL element formed over the substrate, a power supply line for supplying a power source to the organic EL element, and at least one TFT provided on a wiring path from the power supply line to the organic EL element. The TFT has a semiconductor layer which is arranged between a source electrode and a drain electrode and is electrically connected to the source electrode and the drain electrode. A laser beam is irradiated from a downward direction of the substrate to a region which does not overlap a gate electrode, the source electrode, the drain electrode, and the wiring layer when seen as a plan view in a plane region where the semiconductor layer is provided.Type: GrantFiled: November 15, 2011Date of Patent: October 14, 2014Assignee: Canon Kabushiki KaishaInventors: Junya Tamaki, Takashi Moriyama, Nobuhiko Sato, Kaoru Okamoto, Yasushi Iwakura, Masahiro Fushimi
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Patent number: 8664017Abstract: Provided is a method of manufacturing an organic light emitting device capable of suppressing a patterning defect caused by a residue of a release layer, the method including: a first organic compound layer formation step; a first protective layer formation step; a second protective layer formation step; a second protective layer processing step; a first protective layer processing step; a first organic compound layer processing step; a second organic compound layer formation step; and a lift-off step in which the pattern of the second protective layer obtained in the second protective layer processing step is formed also in a second region.Type: GrantFiled: February 7, 2013Date of Patent: March 4, 2014Assignee: Canon Kabushiki KaishaInventors: Masahiro Fushimi, Junya Tamaki, Manabu Otsuka, Takuro Yamazaki
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Patent number: 8629857Abstract: Light is prevented from being emitted from a region that overlaps a contract hole in a structure in which light emitting devices are stacked. A stacked organic electro-luminescent display apparatus includes a contact hole that electrically connects a first electrode or a second electrode to a driving circuit. The first or second electrode and a second organic compound layer are provided in the contact hole, and the second organic compound layer existing in the contact hole does not emit light.Type: GrantFiled: July 9, 2009Date of Patent: January 14, 2014Assignee: Canon Kabushiki KaishaInventors: Takashi Moriyama, Toshihiko Mimura, Nobuhiko Sato, Kohei Nagayama, Masami Iseki, Nozomu Izumi, Junya Tamaki
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Publication number: 20120133272Abstract: Provided is an organic EL display apparatus in which, depending on a situation in which a user uses the organic EL display apparatus, “display with high light use efficiency and high front luminance (luminous efficiency)” or “display with large view angle” is selectable. Pixels each include subpixels having different optical characteristics from each other, and the pixels and the subpixels are respectively arranged in a staggered pattern. Further, the subpixels are independently controlled.Type: ApplicationFiled: November 8, 2011Publication date: May 31, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Takashi Moriyama, Nobuhiko Sato
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Publication number: 20120127221Abstract: An organic EL displaying apparatus which suppresses a defective display caused by a leak current at a time when an emission period controlling transistor is off is provided. The organic EL displaying apparatus comprises a plurality of pixels each of which includes an organic EL element, a power supply line, a driving transistor and the emission period controlling transistor, a data line, and a control line. In this apparatus, in a certain one of the pixels, a resistance Roff—ILM between source and drain electrodes of the emission period controlling transistor in an off state of the emission period controlling transistor, and a resistance Rbk—Dr between source and drain electrodes of the driving transistor in a state that a minimum gradation displaying data voltage has been applied to a gate electrode of the driving transistor satisfy Roff—ILM?Rbk—Dr.Type: ApplicationFiled: November 15, 2011Publication date: May 24, 2012Applicants: Hitachi Displays, Ltd., CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Nobuhiko Sato, Masami Iseki, Kouji Ikeda, Masahiro Tamura, Takeshi Izumida, Naoki Tokuda
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Publication number: 20120127217Abstract: A dimming method of an organic EL displaying apparatus having a displaying unit constructed by combining pixels each having a substrate, an organic EL element formed over the substrate, a power supply line for supplying a power source to the organic EL element, and at least one TFT provided on a wiring path from the power supply line to the organic EL element. The TFT has a semiconductor layer which is arranged between a source electrode and a drain electrode and is electrically connected to the source electrode and the drain electrode. A laser beam is irradiated from a downward direction of the substrate to a region which does not overlap a gate electrode, the source electrode, the drain electrode, and the wiring layer when seen as a plan view in a plane region where the semiconductor layer is provided.Type: ApplicationFiled: November 15, 2011Publication date: May 24, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Takashi Moriyama, Nobuhiko Sato, Kaoru Okamoto, Yasushi Iwakura, Masahiro Fushimi
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Publication number: 20120062135Abstract: A display apparatus includes a plurality of pixels each including first and second organic EL elements whose emitting periods are controlled by respective emitting-period control TFTs. The second organic EL element has a front luminance lower than that of the first organic EL element. An electric charge charged in a storage capacitor as a gradation display signal in a previous frame is erased through an erasing TFT and the second organic EL element.Type: ApplicationFiled: September 8, 2011Publication date: March 15, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Nobuhiko Sato
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Publication number: 20110148831Abstract: In a light-emitting apparatus including a cap layer disposed on a second electrode and a contact portion, which is disposed in an external region outside the light-emitting region and which electrically connects the second electrode to the drive circuit, the formation end of the cap layer is located in the side nearer to the light-emitting region than is the formation end of the second electrode.Type: ApplicationFiled: December 16, 2010Publication date: June 23, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Junya Tamaki, Takuro Yamazaki, Yojiro Matsuda
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Publication number: 20110115961Abstract: Light is prevented from being emitted from a region that overlaps a contract hole in a structure in which light emitting devices are stacked. A stacked organic electro-luminescent display apparatus includes a contact hole that electrically connects a first electrode or a second electrode to a driving circuit. The first or second electrode and a second organic compound layer are provided in the contact hole, and the second organic compound layer existing in the contact hole does not emit light.Type: ApplicationFiled: July 9, 2009Publication date: May 19, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Takashi Moriyama, Toshihiko Mimura, Nobuhiko Sato, Kohei Nagayama, Masami Iseki, Nozomu Izumi, Junya Tamaki