Patents by Inventor Junya Toda

Junya Toda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190189489
    Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.
    Type: Application
    Filed: July 20, 2017
    Publication date: June 20, 2019
    Inventors: Hiroshi Mimura, Junya Toda
  • Patent number: 8091710
    Abstract: A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: January 10, 2012
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Akihiro Hasegawa, Junya Toda
  • Publication number: 20100032339
    Abstract: A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator.
    Type: Application
    Filed: September 28, 2007
    Publication date: February 11, 2010
    Applicant: SHIN-ETSU POLYMER CO., LTD.
    Inventors: Akihiro Hasegawa, Junya Toda
  • Patent number: 7658289
    Abstract: A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: February 9, 2010
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Patent number: 7658290
    Abstract: A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Grant
    Filed: February 20, 2008
    Date of Patent: February 9, 2010
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Patent number: 7455180
    Abstract: A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Grant
    Filed: October 1, 2003
    Date of Patent: November 25, 2008
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Publication number: 20080149528
    Abstract: A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Application
    Filed: February 20, 2008
    Publication date: June 26, 2008
    Applicant: Shin-Etsu Polymer Co., Ltd.
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Publication number: 20080149527
    Abstract: A substrate storage container includes a container body for accomodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Application
    Filed: January 29, 2008
    Publication date: June 26, 2008
    Applicant: SHIN-ETSU POLYMER CO., LTD.
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Publication number: 20070187287
    Abstract: A substrate storage container is provided which can convey, fix and store substrates safely, with threaded members not being loosened by a load applied to a mounting member of the substrate storage container when the container storing substrates is conveyed or when the container is fixed to a substrate processing apparatus and by a heating process at the time of washing and drying of the container. For fastening the mounting member (6), such as a side plate for conveyance, a bottom plate for positioning the container with respect to a substrate processing apparatus, etc., to the substrate storage container including a container body (1) and a lid (2) by threaded members (3), a locking means for preventing loosening of the threaded members (3) is interposed between engagement surfaces of each threaded member (3) and the mounting member (6).
    Type: Application
    Filed: March 9, 2005
    Publication date: August 16, 2007
    Inventors: Junya Toda, Takayuki Nakayama
  • Publication number: 20050077204
    Abstract: A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
    Type: Application
    Filed: October 1, 2003
    Publication date: April 14, 2005
    Inventors: Atsushi Sumi, Junya Toda, Takayuki Nakayama
  • Patent number: 6504485
    Abstract: Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.
    Type: Grant
    Filed: January 9, 2001
    Date of Patent: January 7, 2003
    Assignee: The Nippon Signal Co., Ltd.
    Inventors: Yoshitaka Jinno, Yoshiharu Ozaki, Norihiro Okada, Heisaku Mazawa, Hidetoshi Fujimoto, Junya Toda, Koichi Futsuhara, Norihiro Asada
  • Publication number: 20020008629
    Abstract: The invention relates to monitoring apparatus and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect.
    Type: Application
    Filed: January 9, 2001
    Publication date: January 24, 2002
    Applicant: The Nippon Signal Co., Ltd.
    Inventors: Yoshitaka Jinno, Yoshiharu Ozaki, Norihiro Okada, Heisaku Mazawa, Hidetoshi Fujimoto, Junya Toda, Koichi Futsuhara, Norihiro Asada
  • Patent number: 6184799
    Abstract: Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.
    Type: Grant
    Filed: December 17, 1996
    Date of Patent: February 6, 2001
    Assignee: The Nippon Signal Co., Ltd.
    Inventors: Yoshitaka Jinno, Yoshiharu Ozaki, Norihiro Okada, Heisaku Mazawa, Hidetoshi Fujimoto, Junya Toda, Koichi Futsuhara, Norihiro Asada