Abstract: A method for manufacturing a large-area volume grating includes: (1) splitting a laser beam into two or more laser beams, converging the two or more laser beams into a sample at an angle less than 60° to form a first plasma grating; (2) moving the sample in a longitudinal direction of a plane vertical to the first plasma grating to etch out a first prefabricated volume grating; (3) moving the sample laterally to form a second plasma grating, an effective cross section of the first prefabricated volume grating partially overlapping with that of the second plasma grating, then moving the sample in a longitudinal direction of a plane vertical to the second plasma grating to etch out a second prefabricated volume; and (4) repeating steps (2) and (3) n times to obtain a volume grating in any size.

Abstract: A device for fabricating a quartz microfluidic chip by a femtosecond pulse cluster. The device includes: a femtosecond pulse cluster laser source configured to output a femtosecond pulse cluster; a beam splitting and interference system, configured to split the femtosecond pulse cluster into a plurality of parts, and to converge split parts to form a femtosecond pulse cluster plasma or a femtosecond pulse cluster plasma grating; a sample system configured to move the electronic displacement platform where a quartz glass is placed to control a position where the parts of the femtosecond pulse cluster are converged on the quartz glass; and a hydrofluoric acid immersion system configured to immerse the quartz glass in a diluent hydrofluoric acid solution to remove an ablated part of the quartz glass to form the quartz microfluidic chip.

Abstract: The present disclosure discloses a method and apparatus for preparing a femtosecond optical filament interference direct writing volume grating/chirped volume grating. The method is characterized in that optical filaments are formed in glass by using femtosecond pulse laser, and plasma is controlled to quickly scan in the glass and etch a volume grating or chirped volume grating structure by adjusting the focal length of convex lens, laser energy and movement of motor machine. The apparatus includes a femtosecond pulse laser module, a pulse chirp management module, a pulse time domain shaping module, a laser separation and interference module, a glass volume grating processing platform module and a camera online imaging module.

Abstract: The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.

Abstract: A device for fabricating a quartz microfluidic chip by a femtosecond pulse cluster. The device includes: a femtosecond pulse cluster laser source configured to output a femtosecond pulse cluster; a beam splitting and interference system, configured to split the femtosecond pulse cluster into a plurality of parts, and to converge split parts to form a femtosecond pulse cluster plasma or a femtosecond pulse cluster plasma grating; a sample system configured to move the electronic displacement platform where a quartz glass is placed to control a position where the parts of the femtosecond pulse cluster are converged on the quartz glass; and a hydrofluoric acid immersion system configured to immerse the quartz glass in a diluent hydrofluoric acid solution to remove an ablated part of the quartz glass to form the quartz microfluidic chip.

Abstract: A method for manufacturing a large-area volume grating includes: (1) splitting a laser beam into two or more laser beams, converging the two or more laser beams into a sample at an angle less than 60° to form a first plasma grating; (2) moving the sample in a longitudinal direction of a plane vertical to the first plasma grating to etch out a first prefabricated volume grating; (3) moving the sample laterally to form a second plasma grating, an effective cross section of the first prefabricated volume grating partially overlapping with that of the second plasma grating, then moving the sample in a longitudinal direction of a plane vertical to the second plasma grating to etch out a second prefabricated volume; and (4) repeating steps (2) and (3) n times to obtain a volume grating in any size.

Abstract: The present disclosure discloses a method and apparatus for preparing a femtosecond optical filament interference direct writing volume grating/chirped volume grating. The method is characterized in that optical filaments are formed in glass by using femtosecond pulse laser, and plasma is controlled to quickly scan in the glass and etch a volume grating or chirped volume grating structure by adjusting the focal length of convex lens, laser energy and movement of motor machine. The apparatus includes a femtosecond pulse laser module, a pulse chirp management module, a pulse time domain shaping module, a laser separation and interference module, a glass volume grating processing platform module and a camera online imaging module.

Abstract: The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.