Abstract: MPCVD device comprises deposition platform, substrate platform, lifting platform, microwave quartz window, upper cover plate, baseplate, pressure sensors, composite windows, thickness measuring device, visual device, temperature measuring device, plasma diagnostic device, vacuum sealing ring and microwave shielding sealing ring. Reaction cavity is formed by upper cover plate and baseplate, and inlet hole is arranged on top of upper cover plate, while exhaust hole is arranged on baseplate; microwave quartz window is annular shaped and arranged between deposition platform and baseplate, and reaction cavity is isolated from air outside by microwave quartz window; lifting platform is provided with vacuum channel and cooling channel therein; vacuum cavity, which is communicated with vacuum channel, is formed by lower surface of substrate platform and upper surface of lifting platform; and pressure sensor for monitoring gas pressure is arranged in vacuum cavity.

Abstract: A high-efficiency and high-precision combined machining apparatus for a diamond wafer sheet and a combined high-efficiency and high-precision method for machining a diamond wafer sheet are disclosed. The apparatus can comprise a machining motion platform component installed on a base, a laser machining component, a grinding component, a polishing component and a detection component installed on a support frame. In operation, a high-energy laser beam of the laser machining component can focus on the surface of the diamond wafer sheet to be machined and perform a straight reciprocating irradiation on the diamond wafer sheet, thereby realizing the planarization machining of the diamond wafer sheet. Further, the grinding component and the polishing component realize further high-precision grinding planarization and finishing polishing machining under the action of the laser machining component.

Abstract: The invention discloses a metal-bonded diamond grinding wheel prepared by self-propagating pressure-less sintering and a preparation method thereof. The metal bonded diamond grinding wheel mainly comprises a working layer and a non-working layer, wherein the working layer comprises metal bond and grinded diamond, the non-working layer is metal bond, and the metal bond in the working layer and non-working layer have the same components that comprise metal powders of Cu, Al, Ni, Ti, Sn, and Co. To prepare the metal-bonded diamond grinding wheel prepared by self-propagating pressure-less sintering solves the problems of high energy consumption and low manufacture efficiency in the current sintering processes of the metal bonded diamond grinding wheel, and improves the binding force of the metal bond to the grinded diamond by forming carbides between the bond and the grinded diamond.

Abstract: The invention discloses a metal-bonded diamond grinding wheel prepared by self-propagating pressure-less sintering and a preparation method thereof. The metal bonded diamond grinding wheel mainly comprises a working layer and a non-working layer, wherein the working layer comprises metal bond and grinded diamond, the non-working layer is metal bond, and the metal bond in the working layer and non-working layer have the same components that comprise metal powders of Cu, Al, Ni, Ti, Sn, and Co. To prepare the metal-bonded diamond grinding wheel prepared by self-propagating pressure-less sintering solves the problems of high energy consumption and low manufacture efficiency in the current sintering processes of the metal bonded diamond grinding wheel, and improves the binding force of the metal bond to the grinded diamond by forming carbides between the bond and the grinded diamond.