Abstract: An electro-optic sampling oscilloscope (or EOS oscilloscope) uses an electro-optic probe containing an electro-optic crystal, which is placed under effect of an electric field caused by a measured signal. Laser pulses are supplied to the electro-optic crystal wherein they are subjected to polarization. Then, measurement data representative of a waveform of the measured signal are produced in response to polarization states of the laser pulses and are stored in a measurement data storage. A user can select specific measurement data by using a list of files of multiple measurement data which is displayed on a screen. Then, the EOS oscilloscope displays an outline waveform which is created based on a reduced number of sample points extracted from the selected measurement data. Comments and/or measurement conditions can be stored in the measurement data storage in relation to the measurement data, so that they are adequately displayed on the screen.

Abstract: The present invention relates to an electro-optic probe, which includes the following components: a laser diode for emitting a modulating laser light according to control signals generated in a main body of the electro-optic sampling oscilloscope; a first lens for converting the modulating laser light to a parallel beam; a second lens for focusing the parallel beam; an opto-electronic element having a reflection film at a reflection-end; an isolator device disposed between the first lens and the second lens for transmitting the modulating laser light and separating a reflected beam produced at the reflection film into signal beams; and photo-diodes for converting optical energies of the signal beams separated by the isolator device into respective electrical signals; wherein, the signal beams to enter the photo-diodes are directed to propagate towards the laser diode, and the photo-diodes are disposed in a longitudinal direction of a probe casing.

Abstract: An electro-optic sampling probe is disclosed, by which both faces of an IC wafer can be measured without moving the IC wafer. In the probe, an excitation optical system is provided at the back face side of a back-face excitation type IC wafer. The back face of the IC wafer is irradiated by light output from the excitation optical system, and simultaneously, the electric signal transmitted through wiring on the IC wafer is measured by using light output from an electro-optic sampling optical system provided at the front face side of the IC wafer. If the excitation optical system is substituted with an electro-optic sampling optical system, an IC wafer having wiring in both faces can also be measured.

Abstract: An electro-optic sampling probe includes an electro-optic element which is to be positioned to contact wiring on an IC wafer surface which is a measurement target and whose optical characteristics are changed depending on an electric field applied via the wiring and an electro-optic sampling optical system module having a polarized beam splitter, a wave plate, and a photo diode. The module separates light, which is transmitted through the electro-optic element and is reflected by a surface of the electro-optic element from laser light emitted from the outside and converts the separated light into an electric signal, and includes an optical axis adjuster attached to a detachable portion of an optical fiber that emits the laser light for adjusting the optical axis of the laser light and a light receiving surface adjuster attached to the detachable portion of the photo diode for adjusting the position of a light receiving surface of the photo diode.

Abstract: The present invention relates to an electro-optic probe, which includes the following components: a laser diode for emitting a modulating laser light according to control signals generated in a main body of the electro-optic sampling oscilloscope; a first lens for converting the modulating laser light to a parallel beam; a second lens for focusing the parallel beam; an opto-electronic element having a reflection film at a reflection-end; an isolator device disposed between the first lens and the second lens for transmitting the modulating laser light and separating a reflected beam produced at the reflection film into signal beams; and photo-diodes for converting optical energies of the signal beams separated by the isolator device into respective electrical signals; wherein, the signal beams to enter the photo-diodes are directed to propagate towards the laser diode, and the photo-diodes are disposed in a longitudinal direction of a probe casing.

Abstract: An electro-optic probe is provided which is able to prevent unnecessary reflected light from optical components in the electro-optic probe from entering photodiodes. The optical components which constitutes an isolator 13 are disposed inclining from an optical path of a parallel light emitted from a collimating lens 8, such that the unnecessary reflected light beams from these optical component surfaces are not incident to the photodiodes 10 and 11. The inclination angle of these optical components are set within a range from an angle formed by an optical path from said optical component to a light receiving element in said photodiode, and the diameter of said light receiving element to an angle allowable for the optical component to maintain the transmittance thereof.

Abstract: A probe for an electro-optic sampling oscilloscope is provided, capable of obtaining an improved accuracy in measurement of the test measuring signals by controlling a temperature of an electro-optic element so as to be maintained at a constant such that the refractive index of the electro-optic element does not change due to the temperature change. The probe for the electro-optic sampling oscilloscope comprises a reflecting film at one end and a metal pin provided on the surface of the reflecting film such that the optical property of the electro-optic film changes according to an electric field applied through the metal pin.

Abstract: An electro-optic sampling probe for preventing noise from being transmitted to photodiodes and improving the measurement accuracy is disclosed. In the probe, the optical system module comprises wavelength plates and polarized beam splitters arranged along an optical path of the relevant laser beam, and photodiodes facing the polarized beam splitters, wherein each photodiode is fixed via an insulating material to the main frame of the optical system module.

Abstract: An electro-optic sampling prober is used to measure a waveform of a measured signal applied to wiring of an IC wafer. Herein, a laser radiates laser beams, which are supplied to an optical module containing an optical isolator and photodiodes by way of an optical fiber. Then, the laser beams pass through an optical wavelength filter to propagate through a prober unit. The laser beams are incident on an electro-optical element, which is changed in polarization state in response to an electric field being caused by the measured signal. The laser beams are reflected by a surface mirror of the electro-optical element, so that reflected beams propagate back through the prober unit and are returned to the optical module by way of the optical wavelength filter. During the measurement, a human operator watches an image of a selected portion of the IC wafer presently placed beneath the prober unit to adjust a positional relationship between the prober unit and IC wafer.

Abstract: In a light receiving circuit for use in electro-optic sampling oscilloscope which receives first and second optical, photodiodes 51 and 52 are connected in series between a positive bias power supply 50P and a negative bias power supply 50N. The photodiodes 51 and 52 receive optical signals whose polarization state correspond to the voltage of a signal to be measured and convert the thus-received optical signals into electric signals. An amplifier 53 amplifies an electric current appearing in a point of connection P between the photodiodes 51 and 52. A current monitor 54 detects the electric signal converted by the photodiode 51, and a current monitor 57 detects the electric signal converted by the photodiode 52. The electric signal detected by the current monitor 54 is subjected to analog-to-digital conversion by an analog-to-digital converter 55, and the electric signal detected by the current monitor 57 is subjected to analog-to-digital conversion by an analog-to-digital converter 58.

Abstract: An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens.

Abstract: An electro-optic sampling probe is disclosed, by which both faces of an IC wafer can be measured without moving the IC wafer. In the probe, an excitation optical system is provided at the back face side of a back-face excitation type IC wafer. The back face of the IC wafer is irradiated by light output from the excitation optical system, and simultaneously, the electric signal transmitted through wiring on the IC wafer is measured by using light output from an electro-optic sampling optical system provided at the front face side of the IC wafer. If the excitation optical system is substituted with an electro-optic sampling optical system, an IC wafer having wiring in both faces can also be measured.

Abstract: A probe for an electrooptic sampling oscilloscope in which an electric field generated by a measured field is coupled with an electrooptic crystal. A beam is incident on this electrooptic crystal, and by the polarization state of the incident beam, the form of the measured signal is measured. The electrooptic element is supported form the end terminal side of the probe body by a probe head member that serves as the end terminal of the probe body. An insertion hole is formed from the outside up to the reflecting film on the probe head member. One end thereof is in contact with a reflecting film, the other end thereof is inserted so as to protrude from the probe head member, and at the same time, the external radial diameter of the insertion hole is formed so as to be large compared to the radial dimension of the reflected film.

Abstract: The electro-optic sampling probe of the present invention comprising: an electro-optic element that is connected to wiring on a surface of a wafer to be measured and whose optical characteristics change when an electric field is applied via the wiring; and an electro-optic sampling optical system module that is provided internally with polarizing beam splitters, wavelength plates, and photodiodes and that splits laser beam irradiated from outside that is transmitted through the electro-optic element and is further reflected at a surface of the electro-optic element that faces the wiring and converts it into electrical signals. Furthermore, the electro-optic sampling optical system module comprises: a ¼wavelength plate for changing laser beam that is elliptically polarized back into linearly polarized light before it enters the electro-optic sampling optical system module; and a ½wavelength plate for adjusting a polarization direction of the linearly polarized light.

Abstract: An electro-optic sampling probe used for observing a waveform of a test signal based on the change of the polarization state of a light pulse caused when the light pulse generated based on a timing signal is entered in an electro-optic crystal that is coupled by an electric field generated by the test signal. The electro-optic sampling probe includes an electro-optic crystal having a stopper portion at its upper portion, an electro-optic crystal supporting portion for supporting the electro-optic crystal by the stopper portion so as not to fall and capable of moving the electro-optic crystal vertically and an electro-optic crystal driving portion formed by a base and a board, to which the electro-optic crystal supporting portion is attached which moves on the base, for rectilinearly moving the electro-optic crystal along the direction of an optical axis.

Abstract: An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens.

Abstract: An electrooptic probe which can facilitate replacement of a metallic pin. A probe head constituting a tip end portion of a probe body including a head body for retaining an electrooptic element and a tip member detachably provided on the head body for retaining the metallic pin.

Abstract: An electro-optic probe having a laser diode for generating a laser beam based on a control signal from an oscilloscope body; a collimator lens for making the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side; an isolator provided between the collimator lens and the electro-optic element, which passes a laser beam generated by the laser diode and isolates a reflected beam which is reflected by the reflective coating; and photodiodes which convert the reflected beam isolated by the isolator into electrical signals. The electro-optic element is integrally affixed to a probe head which is rotatable with respect to a probe body on which the probe head is mounted.

Abstract: The present invention relates to an electrooptic probe that couples an electrical field generated by a measured signal and an electrooptic crystal, makes light incident on this electrooptic crystal, and measures the waveform of the measured signal by the state of the polarization of the incident light. Here, in the probe body 22, the probe head 23 and the supporting member 44 positioned between the end terminal 22a and the part that encloses the laser diode 25 and the photodiodes 38 and 39 are formed by an insulating body (polyacetal resin). Furthermore, the photodiodes 38 and 39 and the laser diode 25 are covered by electromagnetic shield members 41 and 42 that are separated from each other.

Abstract: Disclosed herein is an electro-optic sampling probe in which the quantity of light incident on the electro-optic sampling system module can be adjusted. The probe includes an electro-optic element that has a reflective face, an optical system for transmitting a laser beam received from an external source and an electro-optic sampling optical system module as well as unit for attenuating the quantity of light of the laser beam that is received by the optical system.