Abstract: The invention provides an improved contact ring and an improved workpiece support, each of which is useful alone or jointly with the other in a workpiece holder for electrochemically treating microelectronic workpieces. Several embodiments of the invention provide a composite contact ring having a dielectric base carrying a conductor which delivers electric power to a microelectronic workpiece. The dielectric base may be rigid and define a plurality of rigid fingers, each of which carries a separate electrical contact of the conductor. Such a contact ring is expected to have a long service life and enhance uniformity of electrochemical treatment. Several embodiments of the invention provide a workpiece support which induces a control the flexure of a microelectronic workpiece without damaging the workpiece. This controlled flexure can ensure more uniform contact between the workpiece and a contact assembly despite variations in the workpiece and/or the contact assembly.

Abstract: The present invention is directed toward a melt level detection system for detecting the level of the melt surface in crystal growing systems that utilize a crucible containing a pool of melt from which a seed is withdrawn to grow the crystal. The detection system utilizes a light source for directing a light beam at the melt, and a light detection apparatus positioned on the other side of the melt for receiving the beam of light that is reflected off of the melt. The detection system utilizes a single element linear detector that provides output signals relating to whether the light beam is illuminating the detector, and where on the detector the illumination occurs. A computer system is utilized to implement an algorithm that processes the output signals from the detector which are continually sampled over time. The algorithm disregards the location data sent from the detector if it determines that the light beam was not incident on the detector for a given sample.

Abstract: The present invention is directed toward a feeder system for replenishing the melt in a crystal growing system that utilizes a heated crucible containing a pool of melted charge material from which a seen is withdrawn to grow the crystal. The feed system utilizes a storage hopper for storing solid pellets of the charge material. The storage hopper is provided with an opening at the bottom thereof which allows pellets to flow out of the hopper. A rotating plate is provided below the opening for collecting pellets that flow from the opening and enables piles of pellets to be formed thereon. A wiper is provided that extends across a portion of the plate and, as the plate is rotated, contacts the pellet piles to wipe pellets off of the plate. Thereafter, the pellets are collected and sourced to the melt to accomplish replenishment thereof.