Patents by Inventor Jurg Schmitzberger

Jurg Schmitzberger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quartz boat method and apparatus for thin film thermal treatment
    Patent number: 8461061
    Abstract: A method of supporting a plurality of planar substrates in a tube shaped furnace for conducting a thermal treatment process is disclosed. The method uses a boat fixture having a base frame including two length portions and a first width portion, a second width portion, and one or more middle members connected between the two length portions. Additionally, the method includes mounting a removable first grooved rod respectively on the first width portion, the second width portion, and each of the one or more middle members, each first grooved rod having a first plurality of grooves characterized by a first spatial configuration. The method further includes inserting one or two substrates of a plurality of planar substrates into each groove in the boat fixture separated by a distance.
    Type: Grant
    Filed: June 28, 2011
    Date of Patent: June 11, 2013
    Assignee: Stion Corporation
    Inventors: Paul Alexander, Jurg Schmitzberger, Ashish Tandon, Robert D. Wieting
  • Quartz Boat Method and Apparatus for Thin Film Thermal Treatment
    Publication number: 20120021552
    Abstract: A method of supporting a plurality of planar substrates in a tube shaped furnace for conducting a thermal treatment process is disclosed. The method uses a boat fixture having a base frame including two length portions and a first width portion, a second width portion, and one or more middle members connected between the two length portions. Additionally, the method includes mounting a removable first grooved rod respectively on the first width portion, the second width portion, and each of the one or more middle members, each first grooved rod having a first plurality of grooves characterized by a first spatial configuration. The method further includes inserting one or two substrates of a plurality of planar substrates into each groove in the boat fixture separated by a distance.
    Type: Application
    Filed: June 28, 2011
    Publication date: January 26, 2012
    Applicant: Stion Corporation
    Inventors: Paul Alexander, Jurg Schmitzberger, Ashish Tandon, Robert D. Wieting