Patents by Inventor Jurg Schmitzburger

Jurg Schmitzburger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8142521
    Abstract: An apparatus for fabricating thin films on substrate panels includes a deposition chamber enclosed by sidewalls, a lid, and a base. The apparatus includes a mixing chamber disposed above the lid and configured to receive vapor species and form a mixed vapor. The mixing chamber is coupled with the deposition chamber via inlets through the lid, including a diffuser plate. Two heater plates disposed side by side on the base supporting and heating two substrates.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: March 27, 2012
    Assignee: Stion Corporation
    Inventors: Robert D. Wieting, Kenneth B. Doering, Jurg Schmitzburger
  • Publication number: 20110230006
    Abstract: An apparatus for fabricating thin films on substrate panels includes a deposition chamber enclosed by sidewalls, a lid, and a base. The apparatus includes a mixing chamber disposed above the lid and configured to receive vapor species and form a mixed vapor. The mixing chamber is coupled with the deposition chamber via inlets through the lid, including a diffuser plate. Two heater plates disposed side by side on the base supporting and heating two substrates.
    Type: Application
    Filed: March 16, 2011
    Publication date: September 22, 2011
    Applicant: Stion Corporation
    Inventors: Robert D. Wieting, Kenneth B. Doering, Jurg Schmitzburger