Abstract: A method for finding optimum bond parameters for a bond force FB and an ultrasonic variable P and, optionally, at least one further bond parameter of a wire bonder uses a sensor sensitive to a shear force exerted by the capillary on a connection point. A predetermined number of bonding operations with varying bonding parameters is performed. Optimum bond parameters are derived from the signal of the sensor.

Abstract: A Wire Bonder has a capillary clamped to a horn. An ultrasonic transducer applies ultrasonics to the horn whereby the ultrasonic transducer is controlled by a parameter P. For calibration of the parameter P, a pizoresistive sensor integrated into a semiconductor chip is used. The capillary is lowered onto the semiconductor chip and a bond force is applied to it. Afterwards, a value P1 of the parameter P is applied to the ultrasonic transducer and the output signal of the sensor is stored as the reference value URef as soon as the transient reaction is concluded. The bond force is selected great enough so that the capillary does not slide back and forth. The Wire Bonder, for example after changing the capillary, is then recalibrated in that a correction factor &ggr; is analogously determined so that the amplitude of the sensor signal assumes the value URef when the ultrasonic transducer is operated with the value P2=&ggr;*P1.

Abstract: Optimum bond parameters for a bond force FB and an ultrasonic variable P and, optionally, at least one further bond parameter of a Wire Bonder can be determined by means of a method with the following steps:

Abstract: A Wire Bonder has a capillary clamped to a horn. An ultrasonic transducer applies ultrasonics to the horn whereby the ultrasonic transducer is controlled by a parameter P. For calibration of the parameter P, a pizoresistive sensor integrated into a semiconductor chip is used. The capillary is lowered onto the semiconductor chip and a bond force is applied to it. Afterwards, a value P1 of the parameter P is applied to the ultrasonic transducer and the output signal of the sensor is stored as the reference value URef as soon as the transient reaction is concluded. The bond force is selected great enough so that the capillary does not slide back and forth.