Patents by Inventor Jurgen Faltus

Jurgen Faltus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Facet mirror having a number of mirror facets
    Patent number: 7354168
    Abstract: A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
    Type: Grant
    Filed: May 18, 2004
    Date of Patent: April 8, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Hubert Holderer, Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert, Frank Melzer, Heinz Mann, Jurgen Faltus, Berndt Warm, Stefan Dornheim
  • Facet mirror having a number of mirror facets
    Publication number: 20050030653
    Abstract: Facet mirror having a number of mirror facets A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
    Type: Application
    Filed: May 18, 2004
    Publication date: February 10, 2005
    Inventors: Hubert Holderer, Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert, Frank Melzer, Heinz Mann, Jurgen Faltus, Berndt Warm, Stefan Dornheim