Abstract: An excimer laser system having a precisely calibratable absolute emission wavelength is provided wherein at least one source of reference light is used. The reference light may be a laser such as a HeNe laser or a cathode lamp such as a hollow Pt, As, C, or Fe cathode lamp. The reference light and the excimer laser beam are directed along substantially the same optical path. The beams are broadened and recollimated by beam expanding optics. The broadened beams impinge upon a dispersive element, preferably an echelle grating, and various orders for each incident wavelength are dispersed. The beams are refocused onto a position sensitive detector such as a CCD camera. Different orders of one or more lines of known wavelength of the reference light and a line from the excimer laser emission are also incident at the detector simultaneously.

Abstract: A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor.

Abstract: 05267372An exhaust manifold includes a curved end portion and at least two T-shaped portions connected to the curved portion through sliding fits, wherein the end portion and the T-shaped portions each are provided with a flange connection and a pipe connection, and wherein each T-shaped portion has a sliding fit connection piece. Each sliding fit connection piece is shaped by internal high pressure shaping at the outer radius of a curved section of the T-shaped portion.

Abstract: An apparatus for hydraulically shaping hollow bodies of metal using a shaping tool arranged in a press frame includes a shaping tool arranged in a press frame, wherein the shaping tool has a lower part mounted so as to be displaceable vertically guided between an open position and a closed position and a movably supported upper part, wherein the lower part can be locked in the closed position by a locking member and the upper part can be pressed hydraulically against the lower part.

Abstract: An arrangement for tightly connecting a metal pipe to a receiving sleeve includes a plug-in sleeve of metal fastened on the metal pipe, wherein the plug-in sleeve has radial projections engaging in two diametrically oppositely located grooves of the receiving sleeve, wherein the grooves terminate at the end face of the receiving sleeve. A U-shaped clamp is inserted in tangential slots of the receiving sleeve and the plug-in sleeve for coupling the sleeves to each other detachably but rigidly against pulling and pushing forces. The plug-in sleeve has a cylindrical fixing portion, a cylindrical coupling portion with greater inner and outer diameter than the fixing portion, and a conically-shaped transition portion integrally connecting the transition portion and the coupling portion. The radial projections are substantially axially oriented tongues cut out of the coupling portion and extending at an angle relative to the coupling portion.

Abstract: A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.

Abstract: A narrow-band laser apparatus comprises an optical resonator including first and second reflectors for reflecting radiation, a laser medium for amplifying radiation in said resonator and an etalon for selecting a given wavelength component from said radiation. A polarizing beam splitter is provided for linearly polarizing said radiation and also for acting as an output coupler. In order to obtain very narrow bandwidth radiation of high intensity, a Faraday rotator is provided for rotating the plane of polarization while maintaining the linear polarization thereby allowing a second wavelength selection element (such as a grating) to be efficiently employed to further narrow the output of the laser.

Abstract: A pulsed laser comprises an oscillator (10), a laser medium (14), a wavelength selective member (12) for tuning the wavelength of a beam pulse (18) emitted by the oscillator, and means for pulsed excitation of the laser medium (14). The laser medium (14) is excited at least twice at consecutive times to generate a single beam pulse (18).