Abstract: A wafer stack with sensor elements hermetically sealed in caverns and a method of fabricating the sensors permitting a reduction in the size of the sensors formed after cutting the wafer stack and also yielding considerable savings in chip area in the manufacture of the wafer stack. The wafer stack includes bonding strips arranged between the individual sensor elements. The wafer stack is diced to form individual sensors by sawing in the middle through the bonding strips.

Abstract: A method for the adaptation of a precontrolled value for a feedback control is based on the realization that, whenever the operating conditions coincide with the calibration conditions for the initial determining of precontrolled values, no control-manipulated variable deviations may occur in all the operating ranges, and that accordingly deviations which are nevertheless observed are a sign that the calibration conditions no longer exist. This may be caused by aging effects or by uncompensated disturbances. The method establishes the differences in control-manipulated variable deviations over different classes of an influencing variable. For each influencing variable class, a correction value is then determined such that, by means of the correction value, the error previously observed for the respective range is compensated during operation of the controlled system.