Patents by Inventor Jurgen P. Brugger

Jurgen P. Brugger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microprobe and scanning probe apparatus having microprobe
    Patent number: 6667467
    Abstract: The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: December 23, 2003
    Assignee: Seiko Instruments Inc.
    Inventors: Nobuhiro Shimizu, Hiroshi Takahashi, Yoshiharu Shirakawabe, Jurgen P. Brugger, Walter Häberle, Gerd K. Binnig, Peter Vettiger
  • Microprobe and scanning type probe apparatus using thereof
    Publication number: 20020020805
    Abstract: The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof.
    Type: Application
    Filed: March 12, 2001
    Publication date: February 21, 2002
    Inventors: Nobuhiro Shimizu, Hiroshi Takahashi, Yoshiharu Shirakawabe, Jurgen P. Brugger, Walter Haberle, Gerd K. Binnig, Peter Vettiger
  • Low-cost photoplastic cantilever
    Patent number: 6291140
    Abstract: A method of manufacturing a cantilever with tip comprising the steps of forming a tip-like indent in a substrate, depositing a photoresist layer which fills said tip-like indent and covers at least a part of said substrate, and photolithographically structuring said photoresist layer to form said cantilever with tip out of said photoresist.
    Type: Grant
    Filed: April 28, 1999
    Date of Patent: September 18, 2001
    Inventors: Cornel Andreoli, Jürgen P. Brugger, Ute Dreschler, Peter Vettiger