Patents by Inventor Jurgen VAN SOEST

Jurgen VAN SOEST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230352266
    Abstract: Disclosed herein is an electron-optical device, a lens assembly and an electron-optical column. The electron-optical device comprises an array substrate and an adjoining substrate and is configured to provide a potential difference between the substrates. An array of apertures is defined in each of the substrates for the path of electron beamlets. The array substrate has a thickness which is stepped so that the array substrate is thinner in the region corresponding to the array of apertures than another region of the array substrate.
    Type: Application
    Filed: June 23, 2023
    Publication date: November 2, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Stijn Wilem Herman Karel STEENBRINK, Johan Joost KONING, Jurgen VAN SOEST, Marco Jan-Jaco WIELAND
  • Publication number: 20230317402
    Abstract: Disclosed herein is an electron-optical assembly for an electron-optical column for projecting a charged particle beam along a beam path towards a target, the electron-optical assembly comprising: electromagnetic shielding surrounding the charged particle beam path and configured to shield the charged particle beam from an electromagnetic field external to the electromagnetic shielding; wherein the electromagnetic shielding comprises a plurality of sections extending along different positions along the beam path, each section surrounding the charged particle beam, wherein the sections are separable.
    Type: Application
    Filed: March 7, 2023
    Publication date: October 5, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Derk Ferdinand WALVOORT, Dmitry MUDRETSOV, Xuerang HU, Qingpo XI, Jurgen VAN SOEST, Marco Jan-Jaco WIELAND
  • Publication number: 20230246568
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: April 10, 2023
    Publication date: August 3, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michael Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST
  • Publication number: 20230238736
    Abstract: Disclosed herein is a connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power source, the connector comprising: a connector wire assembly configured to be in electrical connection with a high voltage power source; and a connector insulator comprising a channel configured to extend into the connector insulator and to receive a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin; wherein the connector insulator is configured to engage with the feedthrough so that a boundary surface of the connector insulator extends substantially bi-directionally in the direction of the longitudinal axis of the channel.
    Type: Application
    Filed: March 16, 2023
    Publication date: July 27, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Boudewijn Weijert Herman Jan VAN DER KROON, Jurgen VAN SOEST
  • Publication number: 20230154719
    Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.
    Type: Application
    Filed: January 17, 2023
    Publication date: May 18, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Laura DINU-GURTLER, Eric Petrus HOGERVORST, Jurgen VAN SOEST
  • Publication number: 20230154725
    Abstract: An emitter is configured to emit charged particles. The emitter comprises a body, a metal layer and a charged particle source layer. The body has a point. The metal layer is of a first metal on at least the point. The charged particle source layer is on the metal layer. The point comprises a second metal other than the first metal.
    Type: Application
    Filed: January 17, 2023
    Publication date: May 18, 2023
    Applicant: ASML Netherlands B.V.
    Inventor: Jurgen VAN SOEST
  • Patent number: 11637512
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: April 25, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius Huinck, Han Willem Hendrik Severt, Allard Eelco Kooiker, Michaël Johannes Christiaan Ronde, Arno Maria Wellink, Shibing Liu, Ying Luo, Yixiang Wang, Chia-Yao Chen, Bohang Zhu, Jurgen Van Soest
  • Publication number: 20230017894
    Abstract: A flood column for charged particle flooding of a sample, the flood column comprising a charged particle source configured to emit a charged particle beam along a beam path; a source lens arranged down-beam of the charged particle source; a condenser lens arranged down-beam of the source lens; and an aperture body arranged down-beam of the condenser lens, wherein the aperture body is for passing a portion of the charged particle beam; and wherein the source lens is controllable so as to variably set the beam angle of the charged particle beam down-beam of the source lens.
    Type: Application
    Filed: September 23, 2022
    Publication date: January 19, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Jurgen VAN SOEST, Gun Sara Mari BERGLUND, Robert Wong Joek Meu HUANG FOEN CHUNG, Diego MARTINEZ NEGRETE GASQUE, Laura DINU GURTLER
  • Patent number: 11557455
    Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: January 17, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Laura Dinu-Gurtler, Eric Petrus Hogervorst, Jurgen Van Soest
  • Publication number: 20230005699
    Abstract: Disclosed herein is an aperture body for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface; a chamber portion comprising an up-beam end, a down-beam end and an up-beam plate, wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.
    Type: Application
    Filed: September 9, 2022
    Publication date: January 5, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Christiaan OTTEN, Christian TEUNISSEN, Boudewjin Weijert Herman Jan VAN DER KROON, Jurgen VAN SOEST
  • Publication number: 20210313908
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: June 17, 2021
    Publication date: October 7, 2021
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST
  • Publication number: 20200043693
    Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.
    Type: Application
    Filed: October 11, 2019
    Publication date: February 6, 2020
    Inventors: Laura DINU-GURTLER, Eric Petrus HOGERVORST, Jurgen VAN SOEST