Abstract: A process for fabricating a low-cost high-efficiency liquid cold plate is described. The process uses a metal extrusion designed with internal fluid channels that have their major cross-sectional axes aligned perpendicular to the major surfaces of the extrusion. Particular dimensions for the cross-sections of the fluid channels and their spacings permit the extrusion process to be performed simply. A simple process for fabricating fluid inlet and outlet manifolds, creating turbulent flow inside the fluid channels, a method for capping the extrusion ends, and a method for improving the surface contact with heat generating components is described.

Abstract: A process for fabricating a low cost high efficiency liquid cold plate is described. The process uses a metal extrusion designed with internal fluid channels. A simple process for fabricating fluid inlet and outlet manifolds, creating turbulent flow inside the fluid channels, a method for capping the extrusion ends, and a method for improving the surface contact with heat generating components is described.

Abstract: A wafer support platen heating system for low pressure chemical vapor deposition of apparatus includes multiple resistance heaters for individual heating of multiple portions of the platen to provide a predetermined uniform or non-uniform temperature gradient/profile across the platen. The multiple graphite resistance heaters of the preferred embodiment include a spiral shaped main resistance heater and two single turn edge loss graphite resistance heaters located within the inner diameter and along the periphery of the outer diameter respectively of the main spiral shaped resistance heater.