Abstract: This invention relates to a plate-type deformable mirror with discrete contacts between the faceplate and the actuators.

Abstract: Voltage-controlled electrostatically actuated membrane deformable mirrors suffer from the potential for excessive voltage to induce an electrostatic snap-down event in which the electrostatic force exceeds the mechanical restoring force of the membrane and the membrane surface collapses onto the electrostatic actuators. We present here low-cost solutions to this problem involving two types of mechanical stand-offs integrated with an electrostatic pad array.

Abstract: This continuous phase sheet deformable mirror leverages advances in polymer manufacturing to create a low-cost alternative to the existing microelectromechanical system (MEMS) and bulk (piezoelectric and electrostrictive) deformable mirror technology. These novel mirrors can be used for any form of phase control including but not limited to piston control, beam steering, and higher order adaptive optics. The preferred mirror surface is a pellicle, but any thin polymer high optical quality surface will suffice. The thin polymer phase sheet can be combined with any actuator structure, like those produced by MEMS, to create a higher quality hybrid deformable mirror.