Abstract: A liquid dispensing system for dispensing two or more liquids of different composition, viscosity, solubility and/or miscibility at high filling speeds into a container through a unitary dispensing nozzle to improve homogeneous mixing of such liquids, while said nozzle is an integral piece free of any movable parts.

Abstract: A substrate cleaning and drying system includes a cleaning station, a drying station positioned adjacent the cleaning station, a cleaner robot to transfer a substrate from the cleaning station to the drying station, an aligner stage adjacent to the drying station, a robot arm rotatable between a substantially vertical first position for receiving the substrate from the drying station and a substantially horizontal second position for releasing the substrate onto the aligner stage, and a factory interface robot to transfer a substrate from the aligner stage into a factory interface module while in a horizontal orientation. The aligner stage includes a rotatable support to hold the substrate in a substantially horizontal orientation and to rotate the substrate to a desired orientation.

Abstract: Provided are compounds of Formula (I): or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing, wherein R1, R2, R3, and R4 are as defined herein. Also provided is a pharmaceutically acceptable composition comprising a compound of Formula (I), or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing. Also provided are methods of using a compound of Formula (I), or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing.

Abstract: A carrier head for holding a substrate in a polishing system includes a housing, a first flexible membrane secured to the housing to form one or more pressurizable chambers to apply pressure through a central membrane portion of the first flexible membrane to a central portion of a substrate, and a plurality of independently operable piezoelectric actuators supported by the housing, the plurality of piezoelectric actuators positioned radially outward of the central membrane portion and at different angular positions so as to independently adjust pressure on a plurality of angular zones in an annular outer region of the substrate surrounding the central portion of the substrate.

Abstract: A wafer processing device may include a wafer exchanger including two or more blades, each of the two or more blades may be configured to receive a wafer, the two or more blades may be rotatable about an axis on a single horizontal plane, and the two or more blades may be movable between at least a load cup and a robot access location; wherein the load cup may include a wafer station that is vertically moveable relative a blade located in the load cup and may be configured to remove a wafer from a blade located in the load cup and place a wafer on a blade located in the load cup. Other devices, load cups and methods are also disclosed herein.

Abstract: A wafer processing device may include a wafer exchanger including two or more blades, each of the two or more blades may be configured to receive a wafer, the two or more blades may be rotatable about an axis on a single horizontal plane, and the two or more blades may be movable between at least a load cup and a robot access location; wherein the load cup may include a wafer station that is vertically moveable relative a blade located in the load cup and may be configured to remove a wafer from a blade located in the load cup and place a wafer on a blade located in the load cup. Other devices, load cups and methods are also disclosed herein.

Abstract: A surface shape determination system includes a surface shape sensor in the form of a flexible and stretchable elastomeric substrate with strain/displacement sensing elements embedded in it. The sensor may be a single-core optical fiber with a series of fiber Bragg Gratings (FBGs) located at predetermined positions along its length. A light source provides an incident light spectrum at one end of the fiber. Each grating of the fiber has index modulation which causes particular wavelengths of the light spectrum that do not satisfy the Bragg condition to be reflected back in the fiber. The refractive index of each grating changes with strain on the substrate due to deflection of it. An interrogator captures the reflected wavelengths and retrieves signal information therefrom. A processor receives the output of the interrogator and performs non-linear regression analysis on the information using a neural network to reconstruct the surface morphology in real-time.

Abstract: A method includes of routing an autonomous vehicle includes receiving information obtained from a camera on a second vehicle distinct from the autonomous vehicle. The method includes automatically identifying a road condition using image analysis of the information received from the camera on the second vehicle. The method includes receiving a request to route the autonomous vehicle from a first location to a second location; and in response to the request: generating a cost model for routing the autonomous vehicle, wherein the cost model includes a cost of the road condition automatically identified from the information received from the camera on the second vehicle; selecting a route from the first location to the second location in accordance with the cost model; and routing an autonomous vehicle in accordance with the selected route.

Abstract: Provided are compounds of Formula (I): or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing, wherein R1, R2, R3, and R4 are as defined herein. Also provided is a pharmaceutically acceptable composition comprising a compound of Formula (I), or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing. Also provided are methods of using a compound of Formula (I), or stereoisomer or tautomer thereof, or a pharmaceutically acceptable salt of any of the foregoing.

Abstract: A substrate cleaning and drying system includes a cleaning station, a drying station positioned adjacent the cleaning station, a cleaner robot to transfer a substrate from the cleaning station to the drying station, an aligner stage adjacent to the drying station, a robot arm rotatable between a substantially vertical first position for receiving the substrate from the drying station and a substantially horizontal second position for releasing the substrate onto the aligner stage, and a factory interface robot to transfer a substrate from the aligner stage into a factory interface module while in a horizontal orientation. The aligner stage includes a rotatable support to hold the substrate in a substantially horizontal orientation and to rotate the substrate to a desired orientation.

Abstract: A substrate cleaning and drying system includes a cleaning station, a drying station positioned adjacent the cleaning station, a cleaner robot to transfer a substrate from the cleaning station to the drying station, an aligner stage adjacent to the drying station, a robot arm rotatable between a substantially vertical first position for receiving the substrate from the drying station and a substantially horizontal second position for releasing the substrate onto the aligner stage, and a factory interface robot to transfer a substrate from the aligner stage into a factory interface module while in a horizontal orientation. The aligner stage includes a rotatable support to hold the substrate in a substantially horizontal orientation and to rotate the substrate to a desired orientation.

Abstract: A carrier head for holding a substrate in a polishing system includes a housing, a first flexible membrane secured to the housing to form one or more pressurizable chambers to apply pressure through a central membrane portion of the first flexible membrane to a central portion of a substrate, and a plurality of independently operable piezoelectric actuators supported by the housing, the plurality of piezoelectric actuators positioned radially outward of the central membrane portion and at different angular positions so as to independently adjust pressure on a plurality of angular zones in an annular outer region of the substrate surrounding the central portion of the substrate.

Abstract: A carrier head for holding a substrate in a polishing system has a housing including a carrier plate, a first flexible membrane secured to the housing, and a plurality of independently operable piezoelectric actuators secured to the carrier plate. The first flexible membrane has an upper surface and having a lower surface that provides a substrate mounting surface. The piezoelectric actuators are positioned above the first flexible membrane so as to independently adjust compressive pressure on the upper surface of the first flexible membrane.

Abstract: A method includes of routing an autonomous vehicle includes receiving information obtained from a camera on a second vehicle distinct from the autonomous vehicle. The method includes automatically identifying a road condition using image analysis of the information received from the camera on the second vehicle. The method includes receiving a request to route the autonomous vehicle from a first location to a second location; and in response to the request: generating a cost model for routing the autonomous vehicle, wherein the cost model includes a cost of the road condition automatically identified from the information received from the camera on the second vehicle; selecting a route from the first location to the second location in accordance with the cost model; and routing an autonomous vehicle in accordance with the selected route.

Abstract: An autonomous vehicle is operable to follow a primary trajectory that forms a portion of a route. While controlling the autonomous vehicle, the autonomous vehicle calculates a failsafe trajectory to follow as a response to a predetermined type of event.

Abstract: An MR marker (501, 601, 803, 902) for magnetic resonance imaging (MRI) guided intervention and method of fabricating same. The tracking device can be integrated with an MRI-guided robotic system to provide precise positional tracking of the interventional tools and robotic components, allowing safe operation inside the human body. The MR tracking device includes a plurality of stacked flexible printed circuit boards; a plurality of flat planar spirals comprised of a non-ferromagnetic material and directly disposed on a top surface and a bottom surface side of each flexible printed circuit board, a biocompatible, non-ferromagnetic material encapsulating the flexible printed circuit boards; and an adhesive bonding the flexible printed circuit boards. In another aspect, an orientation-independent device is provided including three or more markers (501, 601, 803, 902) in an array around a cylindrical substrate.

Abstract: A method includes storing representations of a passengers and fleet vehicles. The method includes generating a graph representation of a geographic map that includes requested pick-up locations and drop-off locations for the passengers and generating a state graph representation of the passengers and the fleet vehicles. The state graph representation includes a plurality of nodes connected by edges. Each of the plurality of nodes represents a candidate state of the passengers and the fleet vehicles. A respective edge of the state graph representation represents an action of a respective vehicle picking up or dropping off a passenger. The respective edge has a cost that is based at least in part on traversal of the graph representation of the geographic map. The method further includes using the state graph representation to generate a set of routes and route the fleet vehicles in accordance with the generated set of routes.

Abstract: A method includes of routing an autonomous vehicle includes receiving information obtained from a camera on a second vehicle distinct from the autonomous vehicle. The method includes automatically identifying a road condition using image analysis of the information received from the camera on the second vehicle. The method includes receiving a request to route the autonomous vehicle from a first location to a second location; and in response to the request: generating a cost model for routing the autonomous vehicle, wherein the cost model includes a cost of the road condition automatically identified from the information received from the camera on the second vehicle; selecting a route from the first location to the second location in accordance with the cost model; and routing an autonomous vehicle in accordance with the selected route.

Abstract: A wafer processing device may include a wafer exchanger including two or more blades, each of the two or more blades may be configured to receive a wafer, the two or more blades may be rotatable about an axis on a single horizontal plane, and the two or more blades may be movable between at least a load cup and a robot access location; wherein the load cup may include a wafer station that is vertically moveable relative a blade located in the load cup and may be configured to remove a wafer from a blade located in the load cup and place a wafer on a blade located in the load cup. Other devices, load cups and methods are also disclosed herein.

Abstract: A method includes of routing an autonomous vehicle includes receiving information obtained from a camera on a second vehicle distinct from the autonomous vehicle. The method includes automatically identifying a road condition using image analysis of the information received from the camera on the second vehicle. The method includes receiving a request to route the autonomous vehicle from a first location to a second location; and in response to the request: generating a cost model for routing the autonomous vehicle, wherein the cost model includes a cost of the road condition automatically identified from the information received from the camera on the second vehicle; selecting a route from the first location to the second location in accordance with the cost model; and routing an autonomous vehicle in accordance with the selected route.