Patents by Inventor Justin Hough
Justin Hough has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11604089Abstract: An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.Type: GrantFiled: November 30, 2020Date of Patent: March 14, 2023Assignee: Applied Materials, Inc.Inventors: Zhiyuan Ye, Justin Hough, Marcel E. Josephson
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Patent number: 11519773Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.Type: GrantFiled: January 30, 2020Date of Patent: December 6, 2022Assignee: Applied Materials, Inc.Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
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Patent number: 11351909Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: GrantFiled: August 28, 2020Date of Patent: June 7, 2022Assignee: Dowco, Inc.Inventors: Jon Alexander, Justin Hough
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Publication number: 20210080313Abstract: An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.Type: ApplicationFiled: November 30, 2020Publication date: March 18, 2021Inventors: Zhiyuan Ye, Justin Hough, Marcel E. Josephson
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Publication number: 20200391651Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: ApplicationFiled: August 28, 2020Publication date: December 17, 2020Applicant: Dowco, Inc.Inventors: Jon Alexander, Justin Hough
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Patent number: 10866135Abstract: Mass flow verification systems and apparatus verify mass flow rates of mass flow controllers (MFCs) based on pressure decay principles. Embodiments include a location for coupling a calibrated gas flow standard or a MFC to be tested in a line to receive a gas flow from a gas supply; a control volume serially coupled to the location in the line to receive the gas flow; a flow restrictor serially coupled to the control volume; a pump serially coupled to the flow restrictor; and a controller adapted to allow the gas supply to flow gas through the mass flow control verification system to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. Numerous additional aspects are disclosed.Type: GrantFiled: March 26, 2018Date of Patent: December 15, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Zhiyuan Ye, Justin Hough, Marcel E. Josephson
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Patent number: 10793049Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: GrantFiled: April 2, 2019Date of Patent: October 6, 2020Assignee: Dowco, Inc.Inventors: Jon Alexander, Justin Hough
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Patent number: 10684159Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.Type: GrantFiled: June 27, 2016Date of Patent: June 16, 2020Assignee: Applied Materials, Inc.Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
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Publication number: 20200166400Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.Type: ApplicationFiled: January 30, 2020Publication date: May 28, 2020Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
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Publication number: 20190293476Abstract: Mass flow verification systems and apparatus verify mass flow rates of mass flow controllers (MFCs) based on pressure decay principles. Embodiments include a location for coupling a calibrated gas flow standard or a MFC to be tested in a line to receive a gas flow from a gas supply; a control volume serially coupled to the location in the line to receive the gas flow; a flow restrictor serially coupled to the control volume; a pump serially coupled to the flow restrictor; and a controller adapted to allow the gas supply to flow gas through the mass flow control verification system to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. Numerous additional aspects are disclosed.Type: ApplicationFiled: March 26, 2018Publication date: September 26, 2019Inventors: Zhiyuan Ye, Justin Hough, Marcel E. Josephson
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Publication number: 20190225136Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: ApplicationFiled: April 2, 2019Publication date: July 25, 2019Applicant: Dowco, Inc.Inventors: Jon Alexander, Justin Hough
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Patent number: 10300833Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: GrantFiled: January 27, 2015Date of Patent: May 28, 2019Assignee: Dowco, Inc.Inventors: Jon Alexander, Justin Hough
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Publication number: 20170370763Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.Type: ApplicationFiled: June 27, 2016Publication date: December 28, 2017Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
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Patent number: 9759373Abstract: An attachment for attaching an accessory to a structure such as a vehicle or boat through a rail having a track. The attachment has at least one welt that is shaped and/or sized to fit within the facial opening of the track when no tensile force is exerted on the attachment and with retained within the track when tensile force is exerted on the attachment.Type: GrantFiled: August 7, 2015Date of Patent: September 12, 2017Assignee: Dowco, Inc.Inventor: Justin Hough
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Publication number: 20160040826Abstract: An attachment for attaching an accessory to a structure such as a vehicle or boat through a rail having a track. The attachment has at least one welt that is shaped and/or sized to fit within the facial opening of the track when no tensile force is exerted on the attachment and with retained within the track when tensile force is exerted on the attachment.Type: ApplicationFiled: August 7, 2015Publication date: February 11, 2016Applicant: DOWCO, INC.Inventor: Justin Hough
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Publication number: 20150211556Abstract: A resilient clip can be used for covers for equipment. The resilient clip has a portion that can be inserted into a channel on the equipment, a portion that can be attached to a cover, and a portion that can be used to remove the clip from the channel.Type: ApplicationFiled: January 27, 2015Publication date: July 30, 2015Applicant: DOWCO, INC.Inventors: Jon Alexander, Justin Hough
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Patent number: 9004107Abstract: The present invention provides methods and apparatus for controlling gas flow to a semiconductor-processing chamber. The invention includes deactivating ratio setpoint feedback control in a flow ratio controller; initiating gas flow through the flow ratio controller; moving valves of the flow ratio controller to a preset position based on a stored position when an upstream pressure reaches a stored upstream pressure value, wherein the stored position and the stored upstream pressure value were stored during a prior process run; determining that steady state flow ratio controller output flows have been reached; and activating ratio setpoint feedback control in the flow ratio controller. Numerous additional features are disclosed.Type: GrantFiled: August 21, 2012Date of Patent: April 14, 2015Assignee: Applied Materials, Inc.Inventors: Mariusch Gregor, John W. Lane, Michael Robert Rice, Justin Hough
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Publication number: 20140053912Abstract: The present invention provides methods and apparatus for controlling gas flow to a semiconductor-processing chamber. The invention includes deactivating ratio setpoint feedback control in a flow ratio controller; initiating gas flow through the flow ratio controller; moving valves of the flow ratio controller to a preset position based on a stored position when an upstream pressure reaches a stored upstream pressure value, wherein the stored position and the stored upstream pressure value were stored during a prior process run; determining that steady state flow ratio controller output flows have been reached; and activating ratio setpoint feedback control in the flow ratio controller. Numerous additional features are disclosed.Type: ApplicationFiled: August 21, 2012Publication date: February 27, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Mariusch Gregor, John W. Lane, Michael Robert Rice, Justin Hough