Patents by Inventor Justin Lee Furse

Justin Lee Furse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of producing structures using a developer-soluble layer with multilayer technology
    Patent number: 8877430
    Abstract: Methods of forming microelectronic structures using multilayer processes are disclosed. The methods comprise the use of a developer-soluble protective layer adjacent the substrate surface in a multilayer stack to protect the substrate during pattern transfer. After etching, the pattern is transferred into the developer-soluble protective layer using a developer instead of etching required by previous methods. Conventional developer-soluble anti-reflective coatings and gap-fill materials can be used to form the protective layer. Custom layers with developer solubility can also be prepared. Microelectronic structures formed by the above processes are also disclosed.
    Type: Grant
    Filed: August 4, 2011
    Date of Patent: November 4, 2014
    Assignee: Brewer Science Inc.
    Inventors: Carlton Ashley Washburn, James E. Lamb, III, Brian A. Smith, Justin Lee Furse, Kang Le Wang
  • METHODS OF PRODUCING STRUCTURES USING A DEVELOPER-SOLUBLE LAYER WITH MULTILAYER TECHNOLOGY
    Publication number: 20120034419
    Abstract: Methods of forming microelectronic structures using multilayer processes are disclosed. The methods comprise the use of a developer-soluble protective layer adjacent the substrate surface in a multilayer stack to protect the substrate during pattern transfer. After etching, the pattern is transferred into the developer-soluble protective layer using a developer instead of etching required by previous methods. Conventional developer-soluble anti-reflective coatings and gap-fill materials can be used to form the protective layer. Custom layers with developer solubility can also be prepared. Microelectronic structures formed by the above processes are also disclosed.
    Type: Application
    Filed: August 4, 2011
    Publication date: February 9, 2012
    Applicant: BREWER SCIENCE INC.
    Inventors: Carlton Ashley Washburn, James E. Lamb, III, Brian A. Smith, Justin Lee Furse, Heping Wang, Kang Le Wang