Patents by Inventor Justin Liou

Justin Liou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10032619
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: July 24, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Publication number: 20180114687
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 26, 2018
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Patent number: 9865447
    Abstract: The broadband light source includes a gas containment structure and a pump laser for generating a pump beam including illumination of a wavelength near that of a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source also includes anamorphic optics for focusing the pump beam into an elliptical beam waist positioned in or near the center of the gas containment structure. The broadband light source also includes collection optics for collecting broadband radiation emitted by the plasma in a direction aligned with a longer axis of the elliptical beam waist.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: January 9, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Publication number: 20170278694
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Application
    Filed: October 4, 2016
    Publication date: September 28, 2017
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden