Abstract: Electrostatic power generator cell architectures having high generator output and a method of manufacture. In one embodiment, parasitic capacitances are reduced by reducing overlap between walls of the chamber and electrodes of the generator cell. In another embodiment, generator component materials are selected to reduce triboelectric effects to improve the coupling of kinetic energy to electrical output, thereby increasing generator output. In a further embodiment, the high permittivity material is selected to increase the modulation of the variable capacitors in the power generator to increase generator output. In still another embodiment, the physical dimensions of the generator cell components are reduced to increase power density. In an additional embodiment, a physical dimension of the generator chamber is based on the dominant motion the generator will be exposed to in a particular application.