Patents by Inventor Jutaek LIM

Jutaek LIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single-wafer-type cleaning apparatus
    Patent number: 9887078
    Abstract: A single-wafer-type cleaning apparatus is provided. The single-wafer-type cleaning apparatus is configured to be capable of controlling electrostatic charges generated due to rotating a wafer during a semiconductor cleaning process and a defect caused by the electrostatic charges. The cleaning process uses an ionizer mounted on a chuck.
    Type: Grant
    Filed: December 29, 2015
    Date of Patent: February 6, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Namsuk Kim, Ohhyung Kwon, Dae-Sung Kim, Jutaek Lim, Jaehyung Jung
  • SINGLE-WAFER-TYPE CLEANING APPARATUS
    Publication number: 20160197000
    Abstract: A single-wafer-type cleaning apparatus is provided. The single-wafer-type cleaning apparatus is configured to be capable of controlling electrostatic charges generated s due to rotating a wafer during a semiconductor cleaning process and a defect caused by the electrostatic charges. The cleaning process uses an ionizer mounted on a chuck.
    Type: Application
    Filed: December 29, 2015
    Publication date: July 7, 2016
    Inventors: Namsuk KIM, Ohhyung KWON, Dae-Sung KIM, Jutaek LIM, Jaehyung JUNG