Patents by Inventor Jyh Shorng Horng

Jyh Shorng Horng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for carrying substrates processed in an etching process and protecting thereof from being dampened by droplets
    Patent number: 6117268
    Abstract: The apparatus of the present invention is used to carry substrates processed in an etching process and provides a guiding member to shelter and protect substrates from being dampened by droplets. The apparatus comprises spaced chucks connected to a substrate holder with two arms, respectively. The guiding member is a roof plate disposed under the chucks and abutted against the arms, so that the guiding member can induce the droplets falling from the chucks to flow to the arms. The substrates can be effectively kept dry and clean.
    Type: Grant
    Filed: July 29, 1999
    Date of Patent: September 12, 2000
    Assignee: Nanya Technology Corporation
    Inventors: Wen Chi Hsu, Yinan Chen, Shang-Shu Chung, Jung-Hsing Chien, Jyh Shorng Horng, Chien-Hua Lee