Abstract: A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas circulation system as opposed to introducing external air into the chamber through the FFU inlet. This enables precise control over the relative humidity and oxygen concentration of the gas used in the chamber, which reduces the oxidation of semiconductor wafers that are transferred through the chamber. The closed gas circulation system may also include an air-flow rectifier, a return vent, and one or more vacuum pumps to form a downflow of collimated gas in the chamber and to automatically control the feed-forward pressure and flow of gas through the chamber and the sealed plenum.

Abstract: A keyboard includes a keyboard base, a membrane circuit substrate, and a press key set having a plurality of press keys. Each of the press keys includes: a keycap, a linkage assembly including intersecting first and second link levers, and a first pivot mechanism to interconnect pivotally the first and second link levers, and an elastic element. The first pivot mechanism includes: a female element having a first opening formed in one of upper and lower surfaces of the first link lever; and a flexible male element outwardly protruding from a lateral surface of the second link lever. The male and female elements are configured such that after the male element is elastically deformed to be pressed into the female element via the first opening, the male element is restored to its original form to be limited in the female element.

Abstract: A keyboard with backlighting functionality includes: a membrane circuit substrate having an upper circuit sheet, an insulator sheet, and a lower circuit sheet laminated together in sequence; a press key set having a plurality of press keys that are disposed on the membrane circuit substrate, and that are capable of being pressed so as to cause the membrane circuit substrate to transmit input signals; and at least one light-emitting element mounted onto a lower surface of the upper circuit sheet that faces the insulator sheet. The membrane circuit substrate is configured as a backlighting sheet that allows light from the light-emitting element to propagate therein, and is formed with a plurality of reflecting dots for directing the light that propagates in the membrane circuit substrate toward the press keys of the press key set.

Abstract: A keyboard includes a keyboard base, a membrane circuit substrate, and a press key set having a plurality of press keys. Each of the press keys includes: a keycap, a linkage assembly including intersecting first and second link levers, and a first pivot mechanism to interconnect pivotally the first and second link levers, and an elastic element. The first pivot mechanism includes: a female element having a first opening formed in one of upper and lower surfaces of the first link lever; and a flexible male element outwardly protruding from a lateral surface of the second link lever. The male and female elements are configured such that after the male element is elastically deformed to be pressed into the female element via the first opening, the male element is restored to its original form to be limited in the female element.

Abstract: A keyboard with backlighting functionality includes: a membrane circuit substrate; a press key set having a plurality of press keys that are disposed on the membrane circuit substrate, and that are capable of being pressed so as to cause the membrane circuit substrate to transmit input signals; and at least one light-emitting element disposed near an edge of the membrane circuit substrate. The membrane circuit substrate is configured as a backlighting sheet that allows light from the light-emitting element to propagate therein, and is formed with an internal structure that is able to direct the light that propagates in the membrane circuit substrate toward the press keys of the press key set.

Abstract: A keyboard with backlighting functionality includes: a membrane circuit substrate having an upper circuit sheet, an insulator sheet, and a lower circuit sheet laminated together in sequence; a press key set having a plurality of press keys that are disposed on the membrane circuit substrate, and that are capable of being pressed so as to cause the membrane circuit substrate to transmit input signals; and at least one light-emitting element mounted onto a lower surface of the upper circuit sheet that faces the insulator sheet. The membrane circuit substrate is configured as a backlighting sheet that allows light from the light-emitting element to propagate therein, and is formed with a plurality of reflecting dots for directing the light that propagates in the membrane circuit substrate toward the press keys of the press key set.