Patents by Inventor Jyothi RAJEEVAN

Jyothi RAJEEVAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM
    Publication number: 20230366715
    Abstract: Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.
    Type: Application
    Filed: July 19, 2023
    Publication date: November 16, 2023
    Inventors: Bindusagar MARATH SANKARATHODI, Zhiyuan YE, Jyothi RAJEEVAN, Ala MORADIAN, Zuoming ZHU, Errol Antonio C. SANCHEZ, Patricia M. LIU
  • Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system
    Patent number: 11733081
    Abstract: Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: August 22, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi Rajeevan, Ala Moradian, Zuoming Zhu, Errol Antonio C. Sanchez, Patricia M. Liu
  • METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM
    Publication number: 20220326061
    Abstract: Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.
    Type: Application
    Filed: April 13, 2021
    Publication date: October 13, 2022
    Inventors: Bindusagar MARATH SANKARATHODI, Zhiyuan YE, Jyothi RAJEEVAN, Ala MORADIAN, Zuoming ZHU, Errol Antonio C. SANCHEZ, Patricia M. LIU