Patents by Inventor Jyoti Agrawal

Jyoti Agrawal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quantitative secondary electron detection
    Patent number: 10256071
    Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: April 9, 2019
    Assignee: Science Tomorrow LLC
    Inventors: Jyoti Agrawal, David C. Joy, Subuhadarshi Nayak
  • Quantitative secondary electron detection
    Patent number: 9966224
    Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: May 8, 2018
    Inventors: Jyoti Agrawal, David C. Joy, Subuhadarshi Nayak
  • QUANTITATIVE SECONDARY ELECTRON DETECTION
    Publication number: 20170309445
    Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.
    Type: Application
    Filed: October 21, 2015
    Publication date: October 26, 2017
    Inventors: Jyoti Agrawal, David C. Joy, Subuhadarshi Nayak
  • QUANTITATIVE SECONDARY ELECTRON DETECTION
    Publication number: 20160148780
    Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.
    Type: Application
    Filed: October 20, 2015
    Publication date: May 26, 2016
    Inventors: Jyoti Agrawal, David C. Joy, Subuhadarshi Nayak