Patents by Inventor Jyuh-Fuh Lin

Jyuh-Fuh Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detecting method for forming semiconductor device
    Patent number: 8755045
    Abstract: In one embodiment, a method for detecting design defects is provided. The method includes receiving design data of an integrated circuit (IC) on a wafer, measuring wafer topography across the wafer to obtain topography data, calculating a scanner moving average from the topography data and the design data to provide a scanner defocus map across the wafer, and determining a hotspot design defect from the scanner defocus map. A computer readable storage medium, and a system for detecting design defects are also provided.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: June 17, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jyuh-Fuh Lin, Te-Chih Huang, Guo-Tsai Huang, Jia-Rui Hu, Chih-Ming Ke
  • DETECTING METHOD FOR FORMING SEMICONDUCTOR DEVICE
    Publication number: 20130176558
    Abstract: In one embodiment, a method for detecting design defects is provided. The method includes receiving design data of an integrated circuit (IC) on a wafer, measuring wafer topography across the wafer to obtain topography data, calculating a scanner moving average from the topography data and the design data to provide a scanner defocus map across the wafer, and determining a hotspot design defect from the scanner defocus map. A computer readable storage medium, and a system for detecting design defects are also provided.
    Type: Application
    Filed: January 6, 2012
    Publication date: July 11, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jyuh-Fuh Lin, Te-Chih Huang, Guo-Tsai Huang, Jia-Rui Hu, Chih-Ming Ke