Abstract: The invention discloses a substrate container including a shell and a cover member. The shell defines an accommodation space, and has a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell. The cover member is mounted to the bottom of the shell, and the cover member and the bottom of the shell define a negative pressure cavity above and communicating with the at least one exhaust hole. An elongated exhaust hole is defined above the negative pressure cavity, and communicates with the negative pressure cavity and the accommodation space. A gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.

Abstract: A door device includes a door body and a substrate retaining assembly. The substrate retaining assembly is disposed on a side of the door body. The substrate retaining assembly includes a retaining body and a plurality of retaining members. The retaining members are disposed on the retaining body and arranged at intervals. Each of the retaining members includes two elastic arms and a clamping structure. The clamping structure includes a clamping body, a clamping groove, and at least one relief portion. The clamping body is connected between the two elastic arms. The clamping groove is located on the clamping body and is communicated with adjacent ends of the elastic arms. The relief portion and the clamping groove are communicated to each other.

Abstract: A valve cover for using in a substrate carrier includes a main body and plural elastic arms. The substrate carrier has a shell and a base disposed on a bottom of the shell. A purge valve is received at the bottom and a gas opening is provided on the base. The main body of the valve cover is disposed on the base, and the elastic arms are disposed on the main body and located at the gas opening. The elastic arms are used for fixing the valve cover between the bottom of the shell and the base. A top face of the valve cover is lower than a surface height of the base and a surface height of the purge valve.

Abstract: Provided is a substrate carrier including: a shell defining therein a wafer storage space; and at least one installation structure integrally formed with an inner wall of the shell and adapted to hold at least one gas diffuser, allowing the at least one gas diffuser to be disposed outside an operating range of a front end of a robotic arm. Not only is the installation structure of the substrate carrier structurally simplified, but the gas diffuser is also prevented from interfering with the robotic arm.

Abstract: A door having a stabilization mechanism for a lock is provided. The door is suitable for a substrate carrier and includes a bottom plate, a cover and a limiting structure. The bottom plate and the cover define an accommodating space for accommodating a plurality of lock structures, each lock structure configured to move between an unlocked position and a locked position, an limiting structure is disposed between lock structure and the cover, and the limiting structure provides an elastic force corresponding to the displacement of the lock structures between the unlocked position and the locked position, such that the lock structures is maintained to move at a horizontal level under the elastic force. The structural design and configuration of the disclosure can prevent collision of substrate carrier or a problem of door drop resulted from the door falling to open/close smoothly.

Abstract: The present invention provides a measuring apparatus for measuring a wafer carrier having an opening end and at least one gas tower deposited inside, the measuring apparatus comprising a carrying interface for securing the wafer carrier. The opening end of the wafer carrier faces an inspection space of measuring apparatus. The carrying interface having a gas supplying assembly connected to a base of the wafer carrier so as to supply gas to the wafer carrier. The internal of the inspection space disposed a measuring assembly which is mainly used to measure gas flow rate from the gas tower in the accommodating space. The measuring assembly comprises a plurality of wind speed sensing elements and a plurality of displacement sensing element, which are fitted to the a second connecting element.

Abstract: The invention discloses a substrate container including a shell and a cover member. The shell defines an accommodation space, and has a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell. The cover member is mounted to the bottom of the shell, and the cover member and the bottom of the shell define a negative pressure cavity above and communicating with the at least one exhaust hole. An elongated exhaust hole is defined above the negative pressure cavity, and communicates with the negative pressure cavity and the accommodation space. A gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.

Abstract: A substrate container includes a container body having a storage space and an opening in communication with the storage, a door body disposed at the opening, a limiter disposed on the door body and facing the opening, a supporter disposed on one side of the storage space, and at least two elastic buffer elements tightly disposed between the door body and the limiter and between the supporter and the container body, respectively. A door assembly of a substrate container, a support assembly of a substrate container and an elastic buffer element used in a substrate container are further provided. The elastic buffer element is applied between any two rigid elements in the substrate container to provide a buffer force and an appropriate frictional force, so as to alleviate the problems of impact and dust generated between the rigid elements.

Abstract: A protective package assembly includes middle, upper, and lower packages. The middle package includes side buffer boards. The side buffer boards are connected in a ring shape to form an accommodating space communicated with upper and lower openings. The upper package includes an upper buffer board and upper buffer members. The upper buffer board is configured to cover the upper opening. The upper buffer members are distributed at intervals and protrude from a surface of the upper buffer board. The upper buffer members are disposed toward the interior of the accommodating space. The lower package includes a lower buffer board and lower buffer members. The lower buffer board is configured to cover the lower opening. The lower buffer members are distributed at intervals and protrude from a surface of the lower buffer board. The lower buffer members are disposed toward the interior of the accommodating space.

Abstract: The invention discloses a substrate container which includes at least one support for substrates. The support has plural ribs distantly separated with each other. The ribs define multiple slots and a carrying plane for receiving a substrate. Each of the ribs has a front end and a rear end. Rear ends of two neighboring ones of the ribs are connected by a closing portion, so that the rear end of a slot defined by the two neighboring ones of the ribs is closed. The closing portion has a concave surface. The concave surface and the carrying plane define a clamping position for substrate confinement.

Abstract: A door device includes a door body and a substrate retaining assembly. The substrate retaining assembly is disposed on a side of the door body. The substrate retaining assembly includes a retaining body and a plurality of retaining members. The retaining members are disposed on the retaining body and arranged at intervals. Each of the retaining members includes two elastic arms and a clamping structure. The clamping structure includes a clamping body, a clamping groove, and at least one relief portion. The clamping body is connected between the two elastic arms. The clamping groove is located on the clamping body and is communicated with adjacent ends of the elastic arms. The relief portion and the clamping groove are communicated to each other.