Patents by Inventor Jyunichi HIRAKIDA

Jyunichi HIRAKIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber apparatus and processing system
    Patent number: 10043689
    Abstract: A chamber apparatus according to the present invention including a chamber main body including an opening portion in an upper surface; a door that opens/closes the opening portion; and a guide mechanism that slides the door with respect to the chamber main body. The door includes a movable member slidably supported by the guide mechanism; a first support provided on the movable member in a fixed manner; a door main body that opens/closes the opening portion; a second support provided on the door main body in a fixed manner; and a floating mechanism that connects the first support and the second support immovably in a horizontal direction and support the second support displaceably in a vertical direction with respect to the first support.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: August 7, 2018
    Assignee: HIRATA CORPORATION
    Inventor: Jyunichi Hirakida
  • CHAMBER APPARATUS AND PROCESSING SYSTEM
    Publication number: 20160358800
    Abstract: A chamber apparatus according to the present invention including a chamber main body including an opening portion in an upper surface; a door that opens/closes the opening portion; and a guide mechanism that slides the door with respect to the chamber main body. The door includes a movable member slidably supported by the guide mechanism; a first support provided on the movable member in a fixed manner; a door main body that opens/closes the opening portion; a second support provided on the door main body in a fixed manner; and a floating mechanism that connects the first support and the second support immovably in a horizontal direction and support the second support displaceably in a vertical direction with respect to the first support.
    Type: Application
    Filed: June 5, 2015
    Publication date: December 8, 2016
    Applicant: HIRATA CORPORATION
    Inventor: Jyunichi HIRAKIDA