Patents by Inventor Jyuntaro Arima

Jyuntaro Arima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sample surface structure measuring method
    Patent number: 4733074
    Abstract: A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample surface by the scanning; and determining the three-dimensional structure of the sample surface from the amount of the secondary electrons measured based on a relation existing between the predetermined three-dimensional structure and the amount of the secondary electrons discharged.
    Type: Grant
    Filed: April 16, 1986
    Date of Patent: March 22, 1988
    Assignee: Hitachi, Ltd.
    Inventors: Makoto Kato, Tetsuo Yokoyama, Jyuntaro Arima, Shimbu Yamagata, Mikihiko Oi, Toshihiro Furuya