Abstract: The present invention provides a low-pressure capacitive tactile sensor for measuring tactile pressures in a range of approximately 0.5 kPa to approximately 20 kPa, the sensor including a first flexible electrode layer; a second flexible electrode layer; a micro-patterned, discontinuous, flexible, UV-curable in approximately 60 seconds or less, elastic polymer nano-imprinted dielectric layer; and a ground shielding layer disposed above the first flexible electrode layer and below the second flexible electrode layer of the capacitive tactile sensor respectively to minimize electromagnetic and capacitive interference. The pressure sensing range of the capacitive tactile sensor is approximately 0.5-20 kPa, the sensitivity is approximately greater than 0.12 pF/kPa. A method for fabricating the capacitive tactile sensor is also provided.

Abstract: The present invention provides a low-pressure capacitive tactile sensor for measuring tactile pressures in a range of approximately 0.5 kPa to approximately 20 kPa, the sensor including a first flexible electrode layer; a second flexible electrode layer; a micro-patterned, discontinuous, flexible, UV-curable in approximately 60 seconds or less, elastic polymer nano-imprinted dielectric layer; and a ground shielding layer disposed above the first flexible electrode layer and below the second flexible electrode layer of the capacitive tactile sensor respectively to minimize electromagnetic and capacitive interference. The pressure sensing range of the capacitive tactile sensor is approximately 0.5-20 kPa, the sensitivity is approximately greater than 0.12 pF/kPa. A method for fabricating the capacitive tactile sensor is also provided.