Abstract: A probe card of an inspecting apparatus is provided with a flitting circuit to cause a flitting by applying voltages to a pair of probes being in contact with an electrode of a substrate to electrically conduct the probes to the substrate, and a switching circuit to electrically connect the probe pair to the flitting circuit to freely switch polarities of the voltages to be applied to the probe pair. The polarities of the voltages to be applied to the probes are changed every time a flitting operation is performed for the electrode of the substrate, so that a trouble of unevenness in quantity of an adhered material on the probes can be eliminated.

Abstract: An inspection apparatus includes a fritting circuit applying a voltage between a probe pair composed of probes in pairs in contact with a substrate to cause a fritting phenomenon to establish electrical conduction between the probes and the substrate; and a switching circuit electrically connecting the probe pair and the flitting circuit and capable of freely switching between polarities of a voltage applied between the probe pair. Voltage is applied twice between the probe pair in contact with the substrate to thereby perform fritting twice. In the two times of fritting, the polarities of the voltage applied between the probe pair are changed.

Abstract: The present invention includes a fritting circuit applying a voltage between a probe pair composed of probes in pairs in contact with a substrate to cause a fritting phenomenon to establish an electrical conduction between at least one of the probe pair and the substrate; and a switching circuit electrically connecting the probe pair and the fritting circuit and capable of freely switching between polarities of a voltage applied between the probe pair. Voltage is applied twice between the probe pair in contact with the substrate to thereby perform fritting twice. In the two times of fritting, the polarities of the voltage applied between the probe pair are changed. According to the present invention, electrical conduction between the probes and the substrate can be obtained more stably.