Patents by Inventor Kai Arstila

Kai Arstila has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Publication number: 20090313730
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: Interuniversitair Microelektronica Centrum vzw (IMEC)
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila