Abstract: A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and in a second extent along a second direction; an amplified light beam is directed along a direction of propagation toward the target location; and the amplified light beam is focused in a focal plane, where the target location is outside of the focal plane and an interaction between the amplified light beam and the target material converts at least part of the target material to plasma that emits EUV light.

Abstract: A cladding stripper includes a plurality of transversal notches or grooves in the outer surface of an exposed inner cladding of a double clad optical fiber. Position and orientation of the notches can be selected to even out cladding light release along the cladding light stripper, enabling more even temperature distributions due to released cladding light. The notches on the optical fiber can be made with a laser ablation system.

Abstract: A cladding stripper includes a plurality of transversal notches or grooves in the outer surface of an exposed inner cladding of a double clad optical fiber. Position and orientation of the notches can be selected to even out cladding light release along the cladding light stripper, enabling more even temperature distributions due to released cladding light. The notches on the optical fiber can be made with a laser ablation system.

Abstract: A cladding stripper includes a plurality of transversal notches or grooves in the outer surface of an exposed inner cladding of a double clad optical fiber. Position and orientation of the notches can be selected to even out cladding light release along the cladding light stripper, enabling more even temperature distributions due to released cladding light. The notches on the optical fiber can be made with a laser ablation system.

Abstract: A locking component, a locking device and a host comprising the locking device are disclosed. The host comprises a card slot which extends along a second direction for inserting an interface card in a first direction which is substantially perpendicular to the second direction. The locking component includes a locking element and a pivot element. The locking element includes two opposite sliding slots each of which has a first and a second slide portion connecting each other. The locking element is adapted for sliding in the second direction such that the first and second slide portions of each sliding slot maintain a distance. The pivot element is adapted for passing through the sliding slots to be disposed at a host such that the locking element is pivotable about the pivot element. Upon positioning the pivot element at the first slide portions, the locking element is rotatable from an open position to an intermediate position.

Abstract: A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and in a second extent along a second direction; an amplified light beam is directed along a direction of propagation toward the target location; and the amplified light beam is focused in a focal plane, where the target location is outside of the focal plane and an interaction between the amplified light beam and the target material converts at least part of the target material to plasma that emits EUV light.

Abstract: A locking component, a locking device and a host comprising the locking device are disclosed. The host comprises a card slot which extends along a second direction for inserting an interface card in a first direction which is substantially perpendicular to the second direction. The locking component includes a locking element and a pivot element. The locking element includes two opposite sliding slots each of which has a first and a second slide portion connecting each other. The locking element is adapted for sliding in the second direction such that the first and second slide portions of each sliding slot maintain a distance. The pivot element is adapted for passing through the sliding slots to be disposed at a host such that the locking element is pivotable about the pivot element. Upon positioning the pivot element at the first slide portions, the locking element is rotatable from an open position to an intermediate position.

Abstract: A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and in a second extent along a second direction; an amplified light beam is directed along a direction of propagation toward the target location; and the amplified light beam is focused in a focal plane, where the target location is outside of the focal plane and an interaction between the amplified light beam and the target material converts at least part of the target material to plasma that emits EUV light.

Abstract: A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and in a second extent along a second direction; an amplified light beam is directed along a direction of propagation toward the target location; and the amplified light beam is focused in a focal plane, where the target location is outside of the focal plane and an interaction between the amplified light beam and the target material converts at least part of the target material to plasma that emits EUV light.

Abstract: A device is described herein which may comprise an optical amplifier having a gain band including wavelengths ?1 and ?2, with ?1??2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength ?1; a main pulse seed laser generating a laser output having wavelength, ?2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Abstract: A cladding stripper includes a plurality of transversal notches or grooves in the outer surface of an exposed inner cladding of a double clad optical fiber. Position and orientation of the notches can be selected to even out cladding light release along the cladding light stripper, enabling more even temperature distributions due to released cladding light. The notches on the optical fiber can be made with a laser ablation system.

Abstract: A device is described herein which may comprise an optical amplifier having a gain band including wavelengths ?1 and ?2, with ?1??2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength ?1; a main pulse seed laser generating a laser output having wavelength, ?2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Abstract: A device is described herein which may comprise an optical amplifier having a gain band including wavelengths ?1 and ?2, with ?1??2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength ?1; a main pulse seed laser generating a laser output having wavelength, ?2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Abstract: As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, t1 and the beam path having a length, L1, along the path from the switch to the irradiation site; with t1<cL1, where c is the speed of light on the path, to protect the oscillator.

Abstract: As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, t1 and the beam path having a length, L1, along the path from the switch to the irradiation site; with t1<cL1, where c is the speed of light on the path, to protect the oscillator.

Abstract: A beam combining system suitable of pulsed fiber laser applications is able to produce non-spatial-dispersive beams using an highly efficient filter, such as a multilayer dielectric filter, in transmission and reflection configurations. The techniques therefore can overcome constraints on laser line-width and beam width and allow for more stable systems for high peak power pulsed laser energy, such as may be used in extreme ultraviolet lithography and other applications.

Abstract: A device is described herein which may comprise an optical amplifier having a gain band including wavelengths ?1 and ?2, with ?1??2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength ?1; a main pulse seed laser generating a laser output having wavelength, ?2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Abstract: An electrochemical deposition method includes disposing a mold into an electrolytic bath for forming a first metal layer on a surface of the mold, bonding a first surface of a conductive component to the first metal layer, and disposing the mold bonded to the conductive component into an electrolytic bath for forming a second metal layer on a second surface of the conductive component.

Abstract: A beam combining system suitable of pulsed fiber laser applications is able to produce non-spatial-dispersive beams using an highly efficient filter, such as a multilayer dielectric filter, in transmission and reflection configurations. The techniques therefore can overcome constraints on laser line-width and beam width and allow for more stable systems for high peak power pulsed laser energy, such as may be used in extreme ultraviolet lithography and other applications.

Abstract: An antenna carrier includes a first carrier block and a second carrier block. A radiator of the antenna carrier includes a first radiation block and a second radiation block. The first carrier block is disposed at a position corresponding to the first radiation block of the radiator. The first carrier block is made of material having a first dielectric constant. The second carrier block is disposed at a position corresponding to the second radiation block of the radiator and is connected to the first carrier block. The second carrier block is made of material having a second dielectric constant. The second dielectric constant is different from the first dielectric constant.