Abstract: A method for diagnosing a user program for controlling movement and positioning tasks of drives operated to execute a movement path of an apparatus, wherein the apparatus and movement path are depicted as a three-dimensional view in a first output element, to depict the movement path, a graphic element formed as a polygonal chain is generated for movement sections, which is operated in a force sensitive manner so that a user can select a location on the polygonal chain with a pointer device and obtain a display of an output field with a line of code that has the program instruction that is responsible through the execution for reaching the location within the movement section of the apparatus or position vector, and a recording method was performed in which the current position vector and the associated line of code or a code line index are recorded at sampling time points.

Abstract: A method for diagnosing a user program for controlling movement and positioning tasks of drives operated to execute a movement path of an apparatus, wherein the apparatus and movement path are depicted as a three-dimensional view in a first output element, to depict the movement path, a graphic element formed as a polygonal chain is generated for movement sections, which is operated in a force sensitive manner so that a user can select a location on the polygonal chain with a pointer device and obtain a display of an output field with a line of code that has the program instruction that is responsible through the execution for reaching the location within the movement section of the apparatus or position vector, and a recording method was performed in which the current position vector and the associated line of code or a code line index are recorded at sampling time points.

Abstract: A method for communication between function modules in drive engineering is described, wherein a first function module has a first sensor interface, wherein a second function module has a second sensor interface, wherein the first sensor interface is functionally assigned to the second sensor interface, wherein the first function module is assigned to a first automation component, wherein the second function module is assigned to a second automation component, wherein an address, in particular a logical address, for the transfer of sensor data is automatically specified.

Abstract: In a method for communication between function modules in the field of automation systems, a first function module has a first communication interface, and a second function module has a second communication interface. The first communication interface is assigned to the second communication interface, and the assignment is stored.

Abstract: A method for communication between function modules in drive engineering is described, wherein a first function module has a first sensor interface, wherein a second function module has a second sensor interface, wherein the first sensor interface is functionally assigned to the second sensor interface, wherein the first function module is assigned to a first automation component, wherein the second function module is assigned to a second automation component, wherein an address, in particular a logical address, for the transfer of sensor data is automatically specified.

Abstract: A high repetition-rate laser plasma target source system wherein ice crystals are irradiated by a laser and lithography system. The target source system comprises in a preferred embodiment a liquid tank source and freezer means which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a high repetition rate liquid-droplet injector into the path of a flashing laser beam, which results in producing soft x-rays of approximately 11.7 nm and 13 nm. Uncollected and unshot target crystals are collected and reliquified by a heater source in order to be recycled back to the liquid tank source. Optionally an auxiliary source and detector system can be used to allow for instantaneous triggering of the laser beam. The target source system can be incorporated into well known EUV lithography systems for the production of wafer chips.

Abstract: A high repetition-rate laser plasma target source system and lithography system is disclosed. The target source system comprises in a preferred embodiment a liquid tank source and freezer which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a high repetition rate liquid-droplet injector into the path of a flashing laser beam, which results in producing soft x-rays of approximately 13 nm. Uncollected and unshot target crystals are collected and reliquified by a heater source in order to be recycled back to the liquid tank source. Optionally an auxiliary source and detector system can be used to allow for instantaneous triggering of the laser beam. The target source system can be incorporated into well known EUV lithography systems for the production of wafer chips.